Nikon
NSR S 208 D KrF Scanner KrF
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
The Nikon NSR S 208 D is a KrF scanner/stepper. The Nikon NSR S 208 D processes 12-inch wafers. The Nikon NSR S 208 D has a vintage of 2011.[1]
What it is
The Nikon NSR S 208 D is a KrF scanner.[1]
How it works
General reference — not yet source-verifiedIn a step-and-scan system, a mask containing the circuit pattern is illuminated with a narrow slit of light.
The mask and wafer move synchronously during exposure, scanning the entire mask image onto the wafer in a single pass.
Where it fits in the process flow
General reference — not yet source-verifiedPhotoresist-coated wafers are exposed in the scanner, then transferred to develop and etch modules to transfer the pattern into the underlying layers.
Applications
General reference — not yet source-verifiedKrF scanners are applied in the production of logic and memory devices, including DRAM and certain NAND flash generations.
What do the numbers mean?
Wafer handling1
Optics & imaging1
Configuration & options2
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Not publicly documented
The following facts about the NSR S 208 D KrF Scanner KrF are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the NSR S 208 D KrF Scanner KrF are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the NSR S 208 D KrF Scanner KrF are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the NSR S 208 D KrF Scanner KrF are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the NSR S 208 D KrF Scanner KrF are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the NSR S 208 D KrF Scanner KrF is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (1)Every fact above is drawn from these public sources
- [1]Inventory photo
Last updated Sep 24, 2026.
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