Waferpedia

Nikon

NSR S 306 C

LithographyNikon NSR S 306 C family
Research Quality: 20% complete

Provisional entry — research in progress

This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.

The Nikon NSR S 306 C is a lithography scanner manufactured by Nikon. The Nikon NSR S 306 C handles 8-inch wafers.[1]

Nikon logo
Fig. — Manufacturer logo, not a photo of this toolWikimedia Commons (see file page for license)

What it is

General reference — not yet source-verified

The Nikon NSR S 306 C is a lithography scanner. Lithography scanners are a class of projection exposure systems that use a step-and-scan method to transfer reticle patterns onto a semiconductor wafer.

Where it fits in the process flow

General reference — not yet source-verified

Photolithography scanners are used in the photolithography step of semiconductor manufacturing. The process typically follows wafer cleaning and coating with photoresist, and is followed by development, etching, and other processing steps. The scanner defines the critical dimensions and pattern placement for each device layer.

What do the numbers mean?

Wafer handling1

Wafer Sizes
8 inch[1]
Accurate?
Interested in this tool?
Need help with this tool?Embed spec card

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

No research found yet — worked with this tool? Share what you know.

Worked with this tool? Help preserve its knowledge →

Frequently asked questions

What type of lithography system is the NSR S 306 C?

The NSR S 306 C is a scanner.[1]

Not publicly documented

The following facts about the NSR S 306 C are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • Fewer than 3 independently cited specifications for the NSR S 306 C are on record; the remainder await public documentation.

    Answerable by: an OEM datasheet, a cleanroom equipment inventory, or an engineer who operated or installed it

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the NSR S 306 C are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the NSR S 306 C are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the NSR S 306 C are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the NSR S 306 C are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

No research found yet — worked with this tool? Share what you know.

Sources & citations

Sources (1)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
Was this page accurate?

Last updated Oct 4, 2026.

Compare with similar tools

View all →