Nikon
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Optical inspection microscopes operate by focusing visible light onto the sample surface and collecting the reflected or transmitted light through a series of objective lenses to create a magnified image for the operator.
Common illumination techniques available on such microscopes include brightfield, darkfield, and differential interference contrast, which enhance the visibility of different types of surface features.
Inspection microscopes are used throughout the semiconductor fabrication process for in-line quality control and off-line failure analysis.
Typical steps where an inspection microscope is applied include after photolithography to check pattern fidelity, after etching to examine sidewall profiles, and after deposition to detect particles or pinholes.
The Nikon Optiphot 200 is applied in wafer inspection for defect detection, critical dimension verification, and overlay alignment checks.
Additional applications include examining thin films, solder bumps, and micro-electromechanical system (MEMS) components where high-resolution optical inspection is required.
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The following facts about the Optiphot 200 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Optiphot 200 are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the Optiphot 200 are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the Optiphot 200 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Optiphot 200 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Optiphot 200 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
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Last updated Sep 30, 2026.
The KLA .204 PSL Wafer is an 8-inch NIST-traceable reference wafer compatible with Surfscan 6xy0 and Sp1 particle counters.
KLA .496 PSL Wafer is an 8-inch NIST traceable wafer stated to be capable on Surfscan 6xy0 and SP1.
The KLA .498 PSL Wafer is a NIST traceable reference wafer.