Waferpedia

Nordson

Stratosphere Plasma Treatment

NordsonStratosphere Plasma Treatment
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Wafer size

Wafer kit sensor

Power

Assy, Chiller, 1HP, 230V/60, 1/4"[1]

Vacuum

16 CFM standard dry pump[1]

Gas delivery

100 sccm MFC[1]

What is it?

What do the numbers mean?

Power & electrical3

Parallel plate asher - able to use RF power supply between 600 to 1000W[1]
Accurate?
Assy, Chiller, 1HP, 230V/60, 1/4"[1]
Accurate?
RF Generator[1]
Accurate?

Vacuum & pumping1

16 CFM standard dry pump[1]
Accurate?

Wafer handling2

Wafer size
Wafer kit sensor[1]
Accurate?
Wafer size
Wafer kit, 200/300mm hybrid[1]
Accurate?

Gas & chemistry1

100 sccm MFC[1]
Accurate?

Configuration & options9

E-FEM, 300mm FOUP (2), ESD[1]
Accurate?
Chamber base[1]
Accurate?
Tuning network[1]
Accurate?
E-FEM safety cover[1]
Accurate?
Integration Kit, Plasma Module (1)[1]
Accurate?
Non-PCR Lit[1]
Accurate?
Heated capacitance manometer[1]
Accurate?
Electrode water cooling[1]
Accurate?
F 3 electrode temperature sensor[1]
Accurate?
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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • ConfigurationParallel plate asher - able to use RF power supply between 600 to 1000W[1]
  • ConfigurationAssy, Chiller, 1HP, 230V/60, 1/4"[1]
  • ConfigurationRF Generator[1]
  • Configuration16 CFM standard dry pump[1]
  • Configuration100 sccm MFC[1]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Not publicly documented

The following facts about the Stratosphere Plasma Treatment are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Stratosphere Plasma Treatment are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the Stratosphere Plasma Treatment are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the Stratosphere Plasma Treatment are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the Stratosphere Plasma Treatment are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the Stratosphere Plasma Treatment is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

No research found yet — worked with this tool? Share what you know.

Sources & citations

Sources (1)Every fact above is drawn from these public sources
  1. [1]inventory listing
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Last updated Jul 29, 2026.

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