Novellus
3290 STQ
What it is
General reference — not yet source-verifiedSputtering systems are physical vapor deposition (PVD) tools used to deposit thin films of conductive or dielectric materials onto semiconductor wafers.
How it works
General reference — not yet source-verifiedIn sputter deposition, a plasma is created in a vacuum chamber, typically using an inert gas such as argon. Positive ions from the plasma bombard a target material, ejecting atoms that then travel to and condense on the wafer surface, forming a thin film.
Where it fits in the process flow
The Novellus 3290 STQ includes a load lock and is configured without an RF etch position, with an installed heater for preheating rather than an RF base. The system is designed for sequential wafer processing in a batch or single-wafer mode depending on the configuration.[1]
Applications
General reference — not yet source-verifiedThe system is used for depositing metals such as aluminum, titanium, titanium nitride, and other materials used in interconnect, barrier, and contact layers.
What do the numbers mean?
Power & electrical9
- DC Power Supply
- 6 / 6 / 12 kW, 208 V (option for 12 /12 / 12 kW AE Pinnacle - input voltage is 400V)[1]
- No RF Etch Position[1]
- Installed Heater for Preheating vs RF Base[1]
- Optional DC Power Supply
- 6 / 6 / 12 kW, 208 V (option for 12 /12 / 12 kW AE Pinnacle at 400 V)[1]
Vacuum & pumping7
Wafer handling1
Gas & chemistry2
- Upgrade to MFC vs. needle valve[1]
Control & software4
Configuration & options2
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
- Phase3 Phase[1]
- Frequency50 Hz[1]
- DC Power Supply12 / 12 / 12 kW, 208 V[1]
- DC Power Supply6 / 6 / 12 kW, 208 V (option for 12 /12 / 12 kW AE Pinnacle - input voltage is 400V)[1]
- ConfigurationCTI Cryo Pumps[1]
- ConfigurationWater Pumps[1]
- ConfigurationUpgrade to MFC vs. needle valve[1]
- ConfigurationNew pressure controller[1]
- Load Lock PumpVarian V 70 Turbo Pump[1]
- ConfigurationNo RF Etch Position[1]
- ConfigurationInstalled Heater for Preheating vs RF Base[1]
- Power Supply Phase/Frequency3 Phase, 50 Hz[1]
- Optional DC Power Supply6 / 6 / 12 kW, 208 V (option for 12 /12 / 12 kW AE Pinnacle at 400 V)[1]
- Cryo PumpsCTI Cryo Pumps[1]
- Water PumpsIncluded[1]
- Mass Flow ControllersUpgrade to MFC vs. needle valve[1]
- Pressure ControllerNew[1]
- PreheatingInstalled Heater for Preheating (no RF Etch Position)[1]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What is the power supply configuration of the 3290 STQ?
The system has DC power supplies: 12/12/12 kW at 208 V, with an option for 6/6/12 kW. The input voltage for the 12/12/12 kW AE Pinnacle option is 400 V.[1]
Does the 3290 STQ have a touch screen interface?
Yes, the system includes a touch screen control interface accessible from both sides.[1]
What pumps are used on the 3290 STQ?
The system uses CTI cryo pumps and a Varian V70 turbo pump for the load lock.[1]
What is the electrical specification of the 3290 STQ?
The system operates on 3-phase, 50 Hz electrical supply.[1]
Not publicly documented
The following facts about the 3290 STQ are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the 3290 STQ are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the 3290 STQ are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the 3290 STQ are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the 3290 STQ are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the 3290 STQ is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (3)Every fact above is drawn from these public sources
- [1]Inventory photo
- [2]Inventory photo
- [3]Equipment inventory listing
Last updated Oct 1, 2026.
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