Olympus
MX 61 F
The Olympus MX 61 F is a Metrology & Inspection microscope that belongs to the Olympus MX 61 family. The Olympus MX 61 F uses UIS Optics and is configured with a microscope stand, nosepiece, observation tube, and stage. The Olympus MX 61 F includes an AL 110 loader for wafer handling.[1][2]
What it is
How it works
General reference — not yet source-verifiedA metrology and inspection microscope forms a magnified optical view of a sample so an operator can examine surface features, alignment features, and inspection targets in the fab environment.
Where it fits in the process flow
General reference — not yet source-verifiedA metrology and inspection microscope is used in process control and quality control rather than in material deposition or pattern transfer.
The Olympus MX 61 F fits at inspection points where patterned wafers or other samples must be examined before later process steps or before release from a process stage.
Applications
General reference — not yet source-verifiedA metrology and inspection microscope is used for visual inspection, feature measurement support, and operator review of surface condition and pattern fidelity.
What do the numbers mean?
Wafer handling2
- Loader AL 110[1]
Optics & imaging2
- Optics UIS Optics[1]
Configuration & options8
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Not publicly documented
The following facts about the MX 61 F are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the MX 61 F are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the MX 61 F are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the MX 61 F are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the MX 61 F are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the MX 61 F is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (2)Every fact above is drawn from these public sources
- [1]Inventory photo
- [2]waferpedia.com — waferpedia.comwaferpedia.com
Last updated Oct 10, 2026.
Compare with similar tools
View all →The KLA .204 PSL Wafer is an 8-inch NIST-traceable reference wafer compatible with Surfscan 6xy0 and Sp1 particle counters.
KLA .496 PSL Wafer is an 8-inch NIST traceable wafer stated to be capable on Surfscan 6xy0 and SP1.
The KLA .498 PSL Wafer is a NIST traceable reference wafer.
