Onto Innovation

Nanospec 210

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Onto InnovationNanospec 210

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What is it?

The Nanospec 210 is a thin film measurement system used in semiconductor process control.

What do the numbers mean?

Gas & chemistry1

Film Types Measured: Oxide on Silicon, Nitride on Silicon, Negative Resist on Silicon, Polysilicon on Oxide, Negative Resist on Oxide, Nitride on Oxide, Polyimide on Silicon, Positive Resist on Silicon, Positive Resist on Oxide^[1]

Optics & imaging4

Spot Size (5x objective): 50 µm^[1]
Spot Size (10x objective): 25 µm^[1]
Spot Size (40x objective): 6.5 µm^[1]
Resolution: 100 angstroms^[2]

Configuration & options6

Thickness Range: 100 to 500,000 angstroms^[1]
Typical Measurement Time: 2.5 seconds^[1]
Reproducibility: 5Å ±5% depending on film type^[1]
Reflectance Mode: Thick Films^[1]
Manufacturer: Onto Innovation (formerly Nanometrics)^[3]
Model: Nanospec 210^[3]

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Film Types MeasuredOxide on Silicon, Nitride on Silicon, Negative Resist on Silicon, Polysilicon on Oxide, Negative Resist on Oxide, Nitride on Oxide, Polyimide on Silicon, Positive Resist on Silicon, Positive Resist on Oxide^[1]

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Not publicly documented

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Not publicly documented

The following facts about the Nanospec 210 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Nanospec 210 are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the Nanospec 210 are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the Nanospec 210 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Nanospec 210 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Nanospec 210 is not on record.
Answerable by: an OEM datasheet or a fab qualification report