Oxford Instruments

PC2000

Oxford Instruments PC2000 family

Research Quality: 30% complete

Provisional entry — research in progress

This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.

The Oxford Instruments PC2000 is a process tool software for controlling Oxford Instruments plasma systems. The PC2000 software runs on Windows XP and interfaces with a black PLC on older systems. The PC2000 software is integrated with the Plasmalab System100 and System133 platforms.^[1]

Oxford InstrumentsPC2000

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What is it?

Applications

The associated Oxford plasma platform is used for dry etching and related plasma processing. The platform is also used with compound semiconductor materials and other etched materials in nanoscale and advanced etch workflows.^[1]

Why won't it start?

Documented failure modes, common issues, and field considerations.

Arcnet drivers compiled against a specific Intel chipset may not work when moving to a new PC.
PC2000 software is custom to each machine, making replacement copies difficult to obtain.

What do the numbers mean?

Wafer handling1

Data logging: Continuous system data logging for traceability of each wafer and process run^[1]

Control & software9

Cluster control: Ability to control a tool cluster from a single interface and PC^[1]
Operating system: Windows XP^[2]
PLC type: Black PLC (older, not upgradeable)^[2]
Software type: Process tool software^[1]
Interface: Front-end visual^[1]
Recipe management: Yes^[1]
User access control: Password-controlled^[1]
Cluster control: Yes, able to control a tool cluster from a single interface and PC^[1]
Host operating system: Windows XP^[2]

Configuration & options6

System type: plasma system^[1]
User login system: Password controlled user login with different levels of access^[1]
Communication standard: Fully GEM/SECS compatible^[1]
Data logging: Continuous system data logging^[1]
Communication protocol: GEM/SECS compatible^[1]
Customization: Per machine^[2]

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Where are the manuals?

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Not publicly documented

Field notes

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Frequently asked questions

What type of PLC does the PC2000 software interface with?

The software interfaces with a black PLC, which is an older type that is not upgradeable.^[2]^[3]

Is the PC2000 software generic or custom for each tool?

Most installations of the PC2000 software are custom to each machine.^[2]

Not publicly documented

The following facts about the PC2000 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the PC2000 are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the PC2000 are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the PC2000 are not on record.
Answerable by: an engineer who operated it or OEM installation records
The process node or technology generation of the PC2000 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the PC2000 are on record.
Answerable by: an OEM parts catalog or a service engineer