Waferpedia

Pfeiffer

TPH 10 HU Turbo

Pfeiffer TPH family
Research Quality: 20% complete

Provisional entry — research in progress

This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.

The Pfeiffer TPH 10 HU Turbo is a turbomolecular pump that includes a TCP 380 controller and cables.[1][2]

PfeifferTPH 10 HU Turbo
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What is it?

Pfeiffer TPH 10 HU Turbo is a turbomolecular pump that includes a TCP 380 controller and cables.

What do the numbers mean?

Vacuum & pumping1

Type
Turbo pump[1]
Accurate?

Control & software2

With TCP 380 controller and cables[1]
Accurate?
Controller
TCP 380 controller and cables[1]
Accurate?

Configuration & options2

Model
TPH 10 HU[1]
Accurate?
Manufacturer
Pfeiffer[1]
Accurate?
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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • TypeTurbo pump[1]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Frequently asked questions

What controller is used with the Pfeiffer TPH 10 HU turbo pump?

The TPH 10 HU is configured with a TCP 380 controller and cables.[1][2]

Not publicly documented

The following facts about the TPH 10 HU Turbo are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the TPH 10 HU Turbo are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the TPH 10 HU Turbo are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the TPH 10 HU Turbo are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the TPH 10 HU Turbo are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the TPH 10 HU Turbo is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

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Sources & citations

Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]TPH 10 HU Turbo — Pfeiffer | Specs, Sourcing & Service | Waferpedia — waferpedia.comwaferpedia.com
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Last updated Oct 10, 2026.

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