Pfeiffer
TPU 062 Turbomolecular Vacuum
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
The Pfeiffer TPU 062 is a turbomolecular vacuum pump. The Pfeiffer TPU 062 delivers a pumping speed of 56 liters per second for nitrogen. The Pfeiffer TPU 062 achieves a final pressure of 1 x 10^-11.[1]
What it is
How it works
Applications
The Pfeiffer TPU 062 turbomolecular pump is used in applications such as freeze drying, degassing, casting, dry vacuum smelting of super-pure metals, incandescent lamp manufacturing, and electronic tubes.[1]
The pump is also applied in thin-film deposition, space simulation, cryogenic research, electron microscopy, nuclear physics, plasma physics, high-energy physics, and particle accelerators and storage rings.[1]
What do the numbers mean?
Vacuum & pumping3
Configuration & options3
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What is the pumping speed of the Pfeiffer TPU 062 for nitrogen?
The pumping speed of the Pfeiffer TPU 062 is 56 liters per second for nitrogen.[1]
What ultimate pressure can the TPU 062 achieve?
The TPU 062 achieves a final pressure of 1×10⁻¹¹ mbar.[1]
What flange types are used on the TPU 062?
The TPU 062 has a DN 63 CF-F inlet flange and a DN 16 ISO-KF outlet flange.[1]
Not publicly documented
The following facts about the TPU 062 Turbomolecular Vacuum are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the TPU 062 Turbomolecular Vacuum are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the TPU 062 Turbomolecular Vacuum are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the TPU 062 Turbomolecular Vacuum are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the TPU 062 Turbomolecular Vacuum are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the TPU 062 Turbomolecular Vacuum is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (3)Every fact above is drawn from these public sources
- [1]ajvs.com — ajvs.comajvs.com
- [2]Inventory photo
- [3]Pfeiffer TPU 062 Turbomolecular Vacuum Pump - Fab Spares LLC — fab-spares.comfab-spares.com
Last updated Oct 7, 2026.
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