Semitool
870 S Dual Stack Spin Rinse
The Semitool 870 S is a Dual Stack Spin Rinse Dryer (SRD). The Semitool 870 S uses a dual-stack design. The Semitool 870 S operates on 1 Phase, 3 Wire, 220 Vac, 50/60 Hz.[1][2]
What it is
How it works
General reference — not yet source-verifiedA spin rinse dryer holds wafers in a rotating chuck or cassette carrier within a sealed process chamber. The tool spins the wafers at controlled speeds while dispensing rinse water to remove chemical residues from prior wet processes. After rinsing, the rotation continues to fling off bulk water, and a heated stream of nitrogen or isopropyl alcohol vapor aids final drying. The dual-stack configuration places two such processing stations one above the other, allowing parallel or sequential operation to increase throughput within the same footprint.
What do the numbers mean?
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
Parts & consumables
Tracked replaceable assemblies, spares criticality, and availability status across all major subsystems. Each entry cites its source.
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
Not publicly documented
The following facts about the 870 S Dual Stack Spin Rinse are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the 870 S Dual Stack Spin Rinse are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the 870 S Dual Stack Spin Rinse are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the 870 S Dual Stack Spin Rinse are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the 870 S Dual Stack Spin Rinse are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the 870 S Dual Stack Spin Rinse is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (4)Every fact above is drawn from these public sources
- [1]Inventory photo
- [2]Inventory photo
- [3]sitekprocess.comsitekprocess.com
- [4]w.hfsemi.comw.hfsemi.com
Last updated Oct 11, 2026.
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