Waferpedia

Semitool

ST 270 D SRD

Provisional entry — research in progress

This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.

ST 270 D SRD — Inventory photo
Fig. 01ST 270 D SRDInventory photo[1]

What it is

The Semitool ST 270 D SRD is a spin rinse dryer for wet processing and clean operations.[1]

How it works

General reference — not yet source-verified

A spin rinse dryer uses centrifugal rotation to remove liquid from wafers after wet processing. The machine rinses the wafer surface and then spins the wafers so residual liquid drains away and evaporates more quickly.

Where it fits in the process flow

General reference — not yet source-verified

A spin rinse dryer sits in wet bench and clean process flow after steps that leave liquid on the wafer surface. The machine supports transition from rinse and wash steps toward dry handling and later process operations.

What do the numbers mean?

Wafer handling1

Wafer size
5 inch[1]
Accurate?

Configuration & options3

OEM
Semitool[1]
Accurate?
Model
ST 270 D[1]
Accurate?
Equipment type
Spin Rinse Dryer (SRD)[1]
Accurate?

Vintage & configurations

Documented models & variants

DesignationGenerationVintageChangesSource
ST-270D SRD Dual Stack Spin Rinser/Dryer———semistarcorp.com[2]
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Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Frequently asked questions

What type of equipment is the Semitool ST 270 D SRD?

The Semitool ST 270 D SRD is a spin rinse dryer.[1]

What process area is the Semitool ST 270 D SRD used in?

The Semitool ST 270 D SRD is used for wet processing and clean operations.[1]

Not publicly documented

The following facts about the ST 270 D SRD are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the ST 270 D SRD are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • The control-system platform and OS era of the ST 270 D SRD are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the ST 270 D SRD are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the ST 270 D SRD is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

  • No publicly documented compatible parts, consumables, or accessories for the ST 270 D SRD are on record.

    Answerable by: an OEM parts catalog or a service engineer

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Sources & citations

Sources (2)Every fact above is drawn from these public sources
  1. [1]Inventory photo
  2. [2]semistarcorp.com — semistarcorp.comsemistarcorp.com
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Last updated Oct 7, 2026.

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