SUSS MicroTec
The SUSS MicroTec 350W MJB3 Mask Aligner is a mask aligner. The SUSS MicroTec 350W MJB3 Mask Aligner is configured for top-side alignment. The SUSS MicroTec 350W MJB3 Mask Aligner has a maximum wafer size of 3" diameter.[1][2]
Wafer size
Wafer Equipment
Power
CIC 500[1]
Vacuum
Vacuum Contact, Hard & Soft[1]
Performance
Top Side Alignment[1]
Optics
3.5x and 10x[1]
How individual machines were equipped when they appeared on the secondary market — as listed, per unit. These describe one specific machine, not the model in general.
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The SUSS MicroTec 350W MJB3 Mask Aligner has a maximum wafer size of 3 inches in diameter.[1][2][3]
The SUSS MicroTec 350W MJB3 Mask Aligner supports vacuum contact, hard, and soft exposure modes.[1][2][3]
The SUSS MicroTec 350W MJB3 Mask Aligner uses a 350 watt lamphouse and UV400 exposure optics for 365 nm and 405 nm exposure.[1][2][3]
The SUSS MicroTec 350W MJB3 Mask Aligner includes a splitfield microscope. One configuration includes an M230 microscope with 10x eyepieces and 3.5x and 10x objectives, and another includes an M400 microscope with 10x eyepieces and 3.2x, 10x, and 20x objectives.[1][2][3]
The following facts about the 350W MJB3 Mask are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the 350W MJB3 Mask are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the 350W MJB3 Mask are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the 350W MJB3 Mask are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the 350W MJB3 Mask are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the 350W MJB3 Mask is not on record.
Answerable by: an OEM datasheet or a fab qualification report
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Last updated Oct 9, 2026.
The SUSS MJB 3 350 W is a mask aligner for 3-inch wafers.
Brooks 017-0146-01 is a prealigner manufactured by Brooks.