SVG
88
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
The SVG 88 is a coater system. The SVG 88 supports 6-inch and 8-inch wafer sizes. The SVG 88 uses a single-track configuration with sender indexer, coat-bake-receiver indexer.[1]
What it is
The SVG 88 is a photoresist coating system used in semiconductor manufacturing to apply a uniform layer of photoresist onto wafers. The SVG 88 is a coater, not a developer or scrubber. The system supports 6-inch and 8-inch wafer sizes. The SVG 88 is configured as a single-track system with a sender indexer, a coat module, bake modules, and a receiver indexer (coat-bake-receiver indexer).[1][2]
What do the numbers mean?
Wafer handling5
Configuration & options2
- Single track[1]
Vintage & configurations
Documented models & variants
| Designation | Generation | Vintage | Changes | Source |
|---|---|---|---|---|
| SVG 88e | — | — | — | shellbacksemi.com[2] |
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
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Not publicly documented
The following facts about the 88 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the 88 are on record.
Answerable by: OEM historical records or a trade-press announcement
The control-system platform and OS era of the 88 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the 88 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the 88 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the 88 are on record.
Answerable by: an OEM parts catalog or a service engineer
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (2)Every fact above is drawn from these public sources
- [1]inventory listing
- [2]shellbacksemi.com — shellbacksemi.comshellbacksemi.com
Last updated Oct 10, 2026.
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