Tegal
903e
The Tegal 903e is a diode plasma etch tool. The Tegal 903e accommodates 75 mm to 150 mm round substrates. The Tegal 903e can also be configured for rectangular substrates from 100 mm to 125 mm on a side.[1][2][3]
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What it is
How it works
Where it fits in the process flow
Applications
The Tegal 903e is used for oxide contact etching.[1]
The Tegal 903e is used for oxide etching, including oxide contact and via etch.[2][3]
The Tegal 903e is used for applications involving GaAs, III-V materials, pad etch, passivation etch, LDD spacer etch, polyimide ILD etch, resist and SOG planarization, non-selective nitride, backside, and compound semiconductor etch.[1][2][3]
- oxide contacts
- oxide etching
- pad etch
- passivation etch
- oxide/contact/via etch
- LDD spacer etch
- polyimide ILD etch
- resist/SOG planarization
- GaAs and other III-V materials applications
- pad passivation etch
- zero layer
- non-selective nitride
- backside etch
- planarization
- poly etch
What do the numbers mean?
Wafer handling6
- Substrate diameter range
- 75 mm to 150 mm round silicon and gallium arsenide (GaAs) substrates[1]
Configuration & options5
Vintage & configurations
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What kind of substrates can the Tegal 903e handle?
The Tegal 903e can accommodate 75 mm to 150 mm round silicon and gallium arsenide substrates, and it can also be configured for rectangular substrates from 100 mm to 125 mm on a side.[1]
What process is the Tegal 903e used for at Fairchild Semiconductor?
Fairchild Semiconductor used the Tegal 903e for non-critical etch needs.[2]
What process is the Tegal 903e used for at Opto Tech?
Opto Tech used the Tegal 903e for oxide etching.[3]
Can the Tegal 903e be used in a through the wall configuration?
The Tegal 903e was manufactured for a through the wall configuration in at least one installation.[2]
Not publicly documented
The following facts about the 903e are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented variants, configuration options, or revision breakpoints of the 903e are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the 903e are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the 903e are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the 903e is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the 903e are on record.
Answerable by: an OEM parts catalog or a service engineer
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (3)Every fact above is drawn from these public sources
- [1]web.archive.org — web.archive.orgweb.archive.org
- [2]web.archive.org — web.archive.orgweb.archive.org
- [3]web.archive.org — web.archive.orgweb.archive.org
Last updated Oct 5, 2026.
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