Tegal
9XX
What it is
General reference — not yet source-verifiedThe Tegal 9XX is a series of plasma etching systems used in semiconductor fabrication to remove material from wafers through chemical and physical processes.
How it works
General reference — not yet source-verifiedPlasma etching systems such as the Tegal 9XX series generate a plasma from process gases inside a vacuum chamber. The plasma contains reactive species that chemically react with the wafer surface, while ion bombardment assists in removing material directionally.
Where it fits in the process flow
General reference — not yet source-verifiedTegal 9XX etchers are used in the etch step after photolithography to transfer patterns into underlying thin films. The process removes material from selected areas defined by a mask, leaving the desired pattern on the wafer.
Applications
General reference — not yet source-verifiedApplications of the Tegal 9XX series include etching of dielectric layers, semiconductor films, and metals in the fabrication of integrated circuits, MEMS devices, and optoelectronic components.
What do the numbers mean?
Power & electrical1
- Documented technical data topics
- Chamber Lower Electrode, Display Panel, Block Diagrams, Gas Interface PCB, Pressure Range Switch Settings, RF Control, Endpoint Filter Specifications[1]
Configuration & options5
Vintage & configurations
Documented models & variants
| Designation | Generation | Vintage | Changes | Source |
|---|---|---|---|---|
| Tegal 901 | — | — | — | legacysemi.com[1] |
| Tegal 903 | — | — | — | legacysemi.com[1] |
| Tegal 915 | — | — | — | legacysemi.com[1] |
| 901e | — | — | Table Top, Standard | legacysemi.com[1] |
| 903e | — | — | Table Top, Upgraded | legacysemi.com[1] |
| 903e Direct Cooled TTW | — | — | Direct Cooled TTW, Standard | legacysemi.com[1] |
| 915e | — | — | — | legacysemi.com[1] |
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
- Documented technical data topicsChamber Lower Electrode, Display Panel, Block Diagrams, Gas Interface PCB, Pressure Range Switch Settings, RF Control, Endpoint Filter Specifications[1]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What types of technical information are available for the Tegal 9XX series?
Available technical information includes LED maps, block diagrams, jumper and switch settings, gas interface PCB details, pressure range switch settings, spatula interface PCB, shuttle interface PCB, RF control, memory-baud expansion PCB settings, backfill times, partial pressures, and endpoint specifications for the 900/901/901e and 903/903e models.[1]
For which models are endpoint filter specifications provided?
Endpoint filter specifications are provided for the 903 and 903e models.[1]
Not publicly documented
The following facts about the 9XX are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the 9XX are on record.
Answerable by: OEM historical records or a trade-press announcement
The control-system platform and OS era of the 9XX are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the 9XX are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the 9XX is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the 9XX are on record.
Answerable by: an OEM parts catalog or a service engineer
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (1)Every fact above is drawn from these public sources
- [1]legacysemi.com — legacysemi.comlegacysemi.com
Last updated Oct 9, 2026.
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