Temescal
VES-2550
The Temescal VES-2550 is an e-beam evaporator and one of the Temescal standard deposition systems. The VES-2550 is designed to provide high throughput without a load lock and is suitable for all evaporation applications. The VES-2550 has a 25.5-inch (648mm) diameter, low-profile chamber.[1]
Plate 01Temescal VES-2550 Thin Film E-Beam Evaporator
Bid ServicellcWatch on YouTube
What it is
How it works
The Temescal VES-2550 accommodates multiple electron beam sources in a low-profile chamber.[1]
Where it fits in the process flow
General reference — not yet source-verifiedA deposition system sits in the thin-film formation stage of semiconductor processing, after substrate preparation and before later patterning or integration steps.
What can it run?
Process applications and technology nodes documented for this tool.
- deposition
What do the numbers mean?
Vacuum & pumping1
Optics & imaging1
Control & software1
Configuration & options12
- Spare parts kit
- VES-2550 O-ring Spares Kit; replacements for all O-rings used on Temescal VES-2550 systems; part no. 0515-5080-0[2]
- Shields kit
- VES-2550 Shields Kit includes main section shield, dome shield, and plenum shields; part no. 0715-3490-0[2]
- O-ring spares kit
- VES-2550 O-ring Spares Kit, replacements for all O-rings used on Temescal VES-2550 systems, part no. 0515-5080-0[2]
- Planet removal tool
- Planet Removal Tool for use in VES-2550 systems with HSP fixtures, part no. 0217-4073-0[3]
- Optional fixture types
- TP-8, HSP, and variable-angle planetary fixtures available upon request for VES-2550 systems[3]
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
- Pumping optionsCryopump standard; diffusion pump and turbopump also available[1]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Not publicly documented
The following facts about the VES-2550 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the VES-2550 are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the VES-2550 are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the VES-2550 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the VES-2550 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the VES-2550 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (5)Every fact above is drawn from these public sources
- [1]semiconductoronline.com — semiconductoronline.comsemiconductoronline.com
- [2]web.archive.org — web.archive.orgweb.archive.org
- [3]web.archive.org — web.archive.orgweb.archive.org
- [4]fabsurplus.comfabsurplus.com
- [5]VES-2550 — Temescal | Specs, Sourcing & Service | Waferpedia — waferpedia.comwaferpedia.com
Last updated Oct 11, 2026.
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