Ulvac
EBX 1000 High Vacuum Evaporation
The Ulvac EBX 1000 High Vacuum Evaporation is a high vacuum evaporation system. The Ulvac EBX 1000 High Vacuum Evaporation is categorized as Deposition.[1][2]
What it is
The Ulvac EBX 1000 is a high vacuum evaporation system used for thin film deposition. The system is a three-phase unit rated for 200 volts at 60 hertz with a power consumption of 5 kVA. The system incorporates a cryopump, an oil rotary vacuum pump, and an oil mist trap. The deposition process is controlled by an Ulvac CRTM-9000 deposition controller, with an Ulvac EGC-10s emission control unit and an ionization vacuum gauge control.[3][1]
Applications
General reference — not yet source-verifiedHigh vacuum evaporation is applied in the manufacture of semiconductor devices, optoelectronic components, and thin film sensors. The process is suited to depositing metals such as aluminum, gold, and chromium, as well as dielectric materials. Evaporation systems of this class are also used in research and development laboratories for small-batch and experimental film deposition.
What do the numbers mean?
Power & electrical4
Vacuum & pumping10
Control & software8
- Control System:[3]
Configuration & options11
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
- Phase3 Phase[3]
- Voltage200V[1]
- Frequency60 Hz[1]
- CryopumpUlvac Cryo-U10PU[3]
- Oil Rotary Vacuum PumpUlvac D-9500K[3]
- Ionization Vacuum Gauge ControlUlvac GI-Tl3RY[3]
- Power3 Phase[1]
- Pressure Regulating Valve 1SMC AW4000-02BDG 0.05-0.85mpa[3]
- Pressure Regulating Valve 2SMC AR3000-03BG-1 0.02-0.2mpa[3]
- High Vacuum Valve 1SMC XLC-50-F9NA[3]
- High Vacuum Valve 2SMC XLC-40-F9 NA[3]
- Vacuum GaugeUlvac WP-01[3]
- Vacuum Gauge SensorUlvac WIB 2002[3]
- Tool typehigh vacuum evaporation system[1]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What types of materials can be deposited using a high vacuum evaporation system?General reference — not yet source-verified
A wide range of materials can be deposited, including metals (such as aluminum, gold, and silver), dielectrics (such as silicon dioxide and magnesium fluoride), and certain organic compounds, provided they can be vaporized without decomposing.
What vacuum level is required for high vacuum evaporation?General reference — not yet source-verified
The chamber must be pumped to a high vacuum regime where the mean free path of vapor molecules is longer than the distance from source to substrate, ensuring line-of-sight deposition and minimal contamination. Typical pressures are in the range that provides a clean deposition environment.
What range of substrate sizes can a high vacuum evaporation system handle?General reference — not yet source-verified
Systems vary from compact research units that handle single small substrates to large production platforms designed for batches of wafers or multiple substrates of various sizes. The chamber design determines the maximum substrate dimensions.
Not publicly documented
The following facts about the EBX 1000 High Vacuum Evaporation are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the EBX 1000 High Vacuum Evaporation are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the EBX 1000 High Vacuum Evaporation are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the EBX 1000 High Vacuum Evaporation are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the EBX 1000 High Vacuum Evaporation are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the EBX 1000 High Vacuum Evaporation is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (3)Every fact above is drawn from these public sources
- [1]waferpedia.com — waferpedia.comwaferpedia.com
- [2]Ulvac EBX 1000 High Vacuum Evaporation family | Waferpedia — waferpedia.comwaferpedia.com
- [3]Inventory photo
Last updated Oct 10, 2026.
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