Waferpedia

Ulvac

SIV 200

Ulvac SIV 200 family
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The Ulvac SIV 200 is a semiconductor equipment model manufactured by Ulvac. The SIV 200 ITO variant of this model is a sputtering deposition system.[1][2][3]

UlvacSIV 200
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What it is

The Ulvac SIV 200 is a sputtering deposition system manufactured by Ulvac.[3][2]

What do the numbers mean?

No specifications recorded yet

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Vintage & configurations

Documented models & variants

DesignationGenerationVintageChangesSource
SIV 200 ITO———waferpedia.com[3]
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Where are the manuals?

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Not publicly documented

Field notes

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Frequently asked questions

What type of machine is the Ulvac SIV 200?

The Ulvac SIV 200 is a sputtering deposition system, a type of physical vapor deposition equipment. The SIV 200 ITO variant is configured for depositing indium tin oxide.[3][2]

Not publicly documented

The following facts about the SIV 200 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No specifications for the SIV 200 are on record.

    Answerable by: an OEM datasheet, a cleanroom equipment inventory, or an engineer who operated or installed it

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the SIV 200 are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • The control-system platform and OS era of the SIV 200 are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the SIV 200 are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the SIV 200 is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

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Sources & citations

Sources (3)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]SIV 200 — Ulvac | Specs, Sourcing & Service | Waferpedia — waferpedia.comwaferpedia.com
  3. [3]waferpedia.com — waferpedia.comwaferpedia.com
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Last updated Sep 30, 2026.

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