Varian
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The Varian V 70 is a turbomolecular vacuum pump. The Varian V 70 is used for high and ultra-high vacuum applications. The Varian V 70 operates from a 54 Vac three-phase supply at 1250 Hz.[1][2]
The Varian V 70, also branded as the Turbo-V 70, is a turbomolecular vacuum pump designed for high and ultra-high vacuum applications. The pump is driven by a high-frequency motor and is available in multiple flange configurations, including ISO 63, ConFlat 4.5 inch, KF 40 NW, and ConFlat 2.75 inch variants.[3][1][2]
A turbomolecular pump operates using a high-speed rotor with bladed stages that impart momentum to gas molecules, directing them toward the exhaust. In the Turbo-V 70, the turbine rotor is supported by permanently lubricated ceramic ball bearings and is driven by a three-phase motor operating at 54 VAC and 1250 Hz during normal operation. The pump can operate in any orientation and relies on natural convection air cooling, with optional forced air or water cooling kits for heavy loads.[1][2]
| Designation | Generation | Vintage | Changes | Source |
|---|---|---|---|---|
| Turbo-V 70 | — | — | ISO 63 high-vacuum flange version. | pages.uoregon.edu[1] |
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With a CF 4.5 inch or ISO 63 flange, the pumping speed is 68 l/s for N₂, 60 l/s for He, and 45 l/s for H₂. With a CF 2.75 inch or KF 40 NW flange, the speeds are 45 l/s for N₂, 50 l/s for He, and 41 l/s for H₂.[1][2]
The ultimate base pressure is 1 × 10⁻⁹ mbar (8 × 10⁻¹⁰ Torr).[1][2]
The pump is offered with ISO 63, ConFlat 4.5 inch, KF 40 NW, and ConFlat 2.75 inch high-vacuum flanges. The foreline flange is KF 16 NW.[1][2]
The rotational speed is 75,000 rpm and the start-up time is less than 60 seconds.[2]
The pump must be used with a compatible Varian controller from the series 969-9405, 969-9505, 969-9507, or 969-9508.[1]
The following facts about the V 70 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the V 70 are on record.
Answerable by: OEM historical records or a trade-press announcement
The control-system platform and OS era of the V 70 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the V 70 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the V 70 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the V 70 are on record.
Answerable by: an OEM parts catalog or a service engineer
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Last updated Oct 10, 2026.