YES

253B-20-40-2

Lab & Support Equipment YES 253B-20-40-2 family

Research Quality: 30% complete

The MKS Type 253B Exhaust Throttle Valve is a butterfly valve. The MKS Type 253B Exhaust Throttle Valve is designed to regulate the removal of gas from a vacuum chamber when used with an MKS controller. The MKS Type 253B Exhaust Throttle Valve is available with KF Style ISO flange options, including model 253B-20-40-2.^[1]

YES253B-20-40-2

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What is it?

The MKS Type 253B Exhaust Throttle Valve is a butterfly valve for controlling gas removal from a vacuum chamber. The MKS Type 253B can be used with Type 651, 652, 152G, or 252 revision D-or-later controllers. The MKS Type 253B is available with ASA, KF Style ISO, NW Style ISO, CF, and JIS flange types.

What can it run?

Process applications and technology nodes documented for this tool.

regulating removal of gas from a vacuum chamber
control of pressure within a vacuum chamber

Why won't it start?

Documented failure modes, common issues, and field considerations.

The manual states that when operating with high vacuum diffusion pumps, pressure above the oil vapor jet should not exceed 0.5 milliTorr.
The manual states that process contaminants can permanently damage the unit or contaminate the process.

What do the numbers mean?

Power & electrical1

Power input: ±15 VDC, 1 Amp (30 Watts) nominal, user-supplied^[1]

Vacuum & pumping2

Type: Exhaust Throttle Valve^[1]
Closed leakage: <10^-7 Torr l/sec^[1]

Control & software1

Controller compatibility: Type 651, 652, 152G, or 252 (revision D or later) controllers^[1]

Dimensions & facilities1

Overall height: 8.64 in (219.5 mm) unheated; 8.81 in (223.8 mm) with heater option^[1]

Configuration & options16

Model: 253B-20-40-2^[1]
Valve mechanism: butterfly valve^[1]
Flange types available: ASA, KF Style ISO, NW Style ISO, CF, and JIS^[1]
Inside diameter: 0.779 in (19.8 mm)^[1]
Mounting flange: KF-40^[1]
Outside diameter: 2.75 in (69.9 mm) unheated; 3.00 in (76.2 mm) with heater option^[1]
Controllable conductance: 0.25 to 31 l/sec^[1]
Flapper seal: None^[1]
Thickness: 2.25 in (57.2 mm)^[1]
Number of bolt holes: N/A^[1]
Bolt hole diameter: N/A^[1]
Bolt circle diameter: N/A^[1]
Flange O-ring groove ID: N/A^[1]
Valve body operating temperature: 0° to 90° C (32° to 194° F) max.^[1]
Valve motor ambient operating temperature: 0° to 70° C (32° to 158° F) max.^[1]
Speed (open to close): 7.5 sec^[1]

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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

TypeExhaust Throttle Valve^[1]
Closed leakage<10^-7 Torr l/sec^[1]
Power input±15 VDC, 1 Amp (30 Watts) nominal, user-supplied^[1]

Where are the manuals?

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Not publicly documented

Field notes

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Not publicly documented

The following facts about the 253B-20-40-2 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the 253B-20-40-2 are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the 253B-20-40-2 are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the 253B-20-40-2 are not on record.
Answerable by: an engineer who operated it or OEM installation records
The process node or technology generation of the 253B-20-40-2 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the 253B-20-40-2 are on record.
Answerable by: an OEM parts catalog or a service engineer