Zygo
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The Zygo NewView 9000 is a 3D optical surface profiler developed by ZYGO. The NewView 9000 uses Coherence Scanning Interferometry (CSI) technology for non-contact optical surface profiling. The NewView 9000 achieves sub-nanometer precision at all magnifications.[1]

Three-dimensional optical surface profilers of this class operate on the principle of white-light interferometry, also known as coherence scanning interferometry. A broadband light source is split into a reference beam and a measurement beam that reflects off the sample surface.
The measurement is non-contact and does not damage the surface. The technique is capable of measuring roughness, step heights, and surface form over areas ranging from sub-millimeter to several millimeters.
In semiconductor fabrication, such profilers are used for characterizing wafer surface quality, CMP (chemical-mechanical planarization) pad condition, and the topography of microstructures. The instrument provides feedback to upstream polishing or deposition processes.
Additional applications include measurement of thin-film thickness, MEMS device topography, and bearing surface quality. The instrument is common in research laboratories and manufacturing quality assurance for industries requiring nanometer-scale surface characterization.
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The following facts about the Newview 9000 3D Optical Surface Profiler are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Newview 9000 3D Optical Surface Profiler are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the Newview 9000 3D Optical Surface Profiler are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the Newview 9000 3D Optical Surface Profiler are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Newview 9000 3D Optical Surface Profiler are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Newview 9000 3D Optical Surface Profiler is not on record.
Answerable by: an OEM datasheet or a fab qualification report
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Last updated Oct 1, 2026.
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