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Comparison ledger

0010-21246 PartversusTurbomolecular Vacuum

Applied Materials 0010-21246 Part, Pfeiffer Turbomolecular Vacuum, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0010-21246 PartApplied Materials
OEMApplied MaterialsPfeiffer
Category——
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
Family—Pfeiffer Turbomolecular Vacuum
Cited variants—
  • SplitFlow 80 Neo[1]
  • SplitFlow 350[1]
Specifications
Turbo Pump—Pfeiffer TMU 071 P[2]
Turbo Controller—Pfeiffer TC 600[2]
Cooling Module—Pfeiffer PM Z01 253[2]
Power Supply Base—Balzers PCU 0200[2]
Make—Pfeiffer[2]
Asset #—145390[2]
Type—Turbomolecular vacuum pump system[2]
Bearing system—Hybrid bearing (ball and permanent magnetic bearing)[1]
Number of stages—Multiple stages[1]
Vacuum level—High and ultra-high vacuum[1]
Mounting position—Any mounting position[1]
Bearing type—Hybrid bearing system (ball and permanent magnetic bearing)[1]
Design—Multi-stage with rotor stacks[1]
Model—-[2]
Sources (2)Every fact above is drawn from these public sources
  1. [1]pfeiffervacuum.compfeiffervacuum.com
  2. [2]inventory listing