Pfeiffer
Turbomolecular Vacuum
The Pfeiffer Turbomolecular Vacuum Pump System is a turbomolecular vacuum pump system. The Pfeiffer Turbomolecular Vacuum Pump System includes a Pfeiffer TMU 071 P turbo pump and a Pfeiffer TC 600 turbo controller. The Pfeiffer Turbomolecular Vacuum Pump System also includes a Pfeiffer PM Z01 253 cooling module and a Balzers PCU 0200 power supply base.[1]
What it is
The Pfeiffer Turbomolecular Vacuum system is a turbomolecular pumping assembly for generating high vacuum in process equipment.[1]
The represented system combines a Pfeiffer TMU 071 P turbo pump, a Pfeiffer TC 600 turbo controller, a Pfeiffer PM Z01 253 cooling module, and a Balzers PCU 0200 power supply base.[1]
How it works
The SplitFlow class uses a hybrid bearing system that combines a ball bearing and a permanent magnetic bearing, and the magnetic bearing stabilizes and balances the rotors without physical contact.[2][3]
The SplitFlow class uses multiple stages separated by rotor stacks, and each stage raises the attainable vacuum level so the pump can achieve progressively higher vacuum without requiring multiple turbopumps.[2][3]
Where it fits in the process flow
Applications
What do the numbers mean?
Power & electrical1
Vacuum & pumping4
Configuration & options9
Vintage & configurations
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
Not publicly documented
The following facts about the Turbomolecular Vacuum are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Turbomolecular Vacuum are on record.
Answerable by: OEM historical records or a trade-press announcement
The control-system platform and OS era of the Turbomolecular Vacuum are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Turbomolecular Vacuum are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Turbomolecular Vacuum is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the Turbomolecular Vacuum are on record.
Answerable by: an OEM parts catalog or a service engineer
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (3)Every fact above is drawn from these public sources
- [1]Inventory photo
- [2]pfeiffervacuum.com — pfeiffervacuum.compfeiffervacuum.com
- [3]SplitFlow: Turbomolecular Vacuum Pumps | Pfeiffer Global — pfeiffervacuum.compfeiffervacuum.com
Last updated Oct 9, 2026.
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