Comparison ledger
Applied Materials 0010-22161 High EFF RF Match, Pfeiffer HiPace 300 Turbomolecular Vacuum, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0010-22161 High EFF RF MatchApplied Materials | HiPace 300 Turbomolecular VacuumPfeiffer |
|---|---|---|
| OEM | Applied Materials | Pfeiffer |
| Category | — | — |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Applied Materials 0010-22161 High EFF RF Match | Pfeiffer HiPace |
| Cited variants | — | |
| Specifications | ||
| Make | Applied Materials[2] | — |
| Model | 0010-22161[2] | — |
| Description | HTESC PH 1 REV A[3] | — |
| Condition | Used[3] | — |
| Stock Number | BM6628[3] | — |
| Configuration | — | With TC 400 Controller Module[4] |
| Product type | — | Turbomolecular vacuum pump[5] |
| Electronic drive unit | — | TC 400[1] |
| Operating voltage, 24 V DC variant | — | 24 ± 5% V DC[1] |
| Operating voltage, 48 V DC variant | — | 48 ± 5% V DC[1] |
| Maximum power consumption, 24 V DC variant | — | 300 W[1] |
| Maximum current consumption, 24 V DC variant | — | 12.5 A[1] |
| Run-up time, 24 V DC variant | — | 1.8 min[1] |
| Maximum power consumption, 48 V DC variant | — | 400 W[1] |
| Maximum current consumption, 48 V DC variant | — | 8.4 A[1] |
| Run-up time, 48 V DC variant | — | 1.2 min[1] |
| Weight, ISO-K | — | 6.7 kg[1] |
| Weight, ISO-F | — | 7 kg[1] |
| Weight, CF-F | — | 8.7 kg[1] |
| HV flange | — | DN 100 ISO-K, DN 100 ISO-F, or DN 100 CF-F[1] |
| Cooling method | — | Standard water, optional air[1] |
| Cooling water temperature | — | 15-35 °C[1] |
| Cooling water consumption | — | 50 l/h[1] |
| Interfaces | — | RS-485, Remote[1] |
| Ultimate pressure with On Tool DryPump | — | <1·10⁻⁷ mbar[1] |
| Rotation speed | — | 60000 rpm (variable 20-100%)[1] |
| Sound pressure level | — | ≤ 50 dB (A)[1] |