Pfeiffer
HiPace 300 Turbomolecular Vacuum
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
What it is
How it works
A turbomolecular pump moves gas by using rapidly rotating blade stages and fixed stator stages to transfer momentum from gas molecules toward the exhaust.[5]
The HiPace 300 uses hybrid bearing technology, rotor balancing, and optimized rotor geometry to support low noise, low vibration, and high gas-load handling.[3]
The HiPace 300 is connected to an electronic drive unit and to a backing pump, and the backing pump provides the fore-vacuum stage for operation.[4]
Where it fits in the process flow
The HiPace 300 sits on the high-vacuum side of a vacuum system and works with a fore-vacuum pump on the backing side.[4]
The HiPace 300 is used in semiconductor vacuum processes including LPCVD, diffusion, stripping, ashing, PVD, inspection and metrology, silicon poly etch, light deposition, ion implantation, PECVD, lithography, metal and high-k etch, oxide etch, load lock and transfer, and ALD.[3][6]
Applications
Why won't it start?
Documented failure modes, common issues, and field considerations.
- Low flow rate troubleshooting is linked to insufficient cooling water flow.
- Unusual noises during operation may indicate bearing damage or rotor damage.
- Leaks may prevent the pump from attaining final rotational speed within the specified run-up time.
What do the numbers mean?
Power & electrical8
Vacuum & pumping3
Control & software2
- With TC 400 Controller Module[1]
Dimensions & facilities5
Configuration & options5
- New / unused[1]
Vintage & configurations
Documented models & variants
| Designation | Generation | Vintage | Changes | Source |
|---|---|---|---|---|
| HiPace 300, 24 V DC | — | — | 24 ± 5% V DC operating voltage, 300 W maximum power consumption, 12.5 A maximum current consumption, 1.8 min run-up time, and variant-specific pumping speed/compression data. | manualslib.com[4] |
| HiPace 300, 48 V DC | — | — | 48 ± 5% V DC operating voltage, 400 W maximum power consumption, 8.4 A maximum current consumption, and 1.2 min run-up time. | manualslib.com[4] |
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
- Product typeTurbomolecular vacuum pump[3]
- Operating voltage, 24 V DC variant24 ± 5% V DC[4]
- Operating voltage, 48 V DC variant48 ± 5% V DC[4]
- Maximum power consumption, 24 V DC variant300 W[4]
- Maximum current consumption, 24 V DC variant12.5 A[4]
- Run-up time, 24 V DC variant1.8 min[4]
- Maximum power consumption, 48 V DC variant400 W[4]
- Maximum current consumption, 48 V DC variant8.4 A[4]
- Run-up time, 48 V DC variant1.2 min[4]
- Ultimate pressure with On Tool DryPump<1·10⁻⁷ mbar[4]
- Sound pressure level≤ 50 dB (A)[4]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What pump type is the HiPace 300?
The HiPace 300 is a turbomolecular vacuum pump.[3]
Not publicly documented
The following facts about the HiPace 300 Turbomolecular Vacuum are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the HiPace 300 Turbomolecular Vacuum are on record.
Answerable by: OEM historical records or a trade-press announcement
The control-system platform and OS era of the HiPace 300 Turbomolecular Vacuum are not on record.
Answerable by: an engineer who operated it or OEM installation records
The process node or technology generation of the HiPace 300 Turbomolecular Vacuum is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the HiPace 300 Turbomolecular Vacuum are on record.
Answerable by: an OEM parts catalog or a service engineer
No publicly hosted manuals, SOPs, or datasheets for the HiPace 300 Turbomolecular Vacuum are on record.
Answerable by: university cleanroom staff or an OEM application specialist
Sources & citations
Sources (6)Every fact above is drawn from these public sources
- [1]Inventory photo
- [2]Inventory photo
- [3]pfeiffervacuum.com — pfeiffervacuum.compfeiffervacuum.com
- [4]manualslib.com — manualslib.commanualslib.com
- [5]https://www.lesker.com/newweb/vacuum_systems/pdf/mcs/13-144-mcs-sy-pfeifferhipace300turbopump.pdf — lesker.comlesker.com
- [6]Pfeiffer HiPace 300 | Pfeiffer United States — pfeiffervacuum.compfeiffervacuum.com
Last updated Oct 3, 2026.
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