Waferpedia

Comparison ledger

Reflexion LK Primeversus12 Lapper

Applied Materials Reflexion LK Prime, Lapmaster 12 Lapper, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
Reflexion LK PrimeApplied Materials
12 LapperLapmaster
OEMApplied MaterialsLapmaster
CategoryCMPCMP
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials Reflexion LK Prime—
Specifications
Outside plate diameter—12 inches[1]
Lapping Speed Range—0 to 60 rpm[2]
Wafer Size Compatibility—4 inches or smaller[1]
Input Voltage—110 V[1]
Frequency—60 Hz[1]
Phase—1[1]
Number of Rings—3[1]
Number of Weights—3[1]
Includes Slurry System—Yes[1]
Includes Timer—Yes[1]

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Sources (2)Every fact above is drawn from these public sources
  1. [1]jmind.comjmind.com
  2. [2]etd.ohiolink.eduetd.ohiolink.edu