Waferpedia

Comparison ledger

VIISta 810versus160 XP Ion

Applied Materials VIISta 810, Varian 160 XP Ion, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
VIISta 810Applied Materials
OEMApplied MaterialsVarian
CategoryIon ImplantationIon Implantation
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials VIISta 810Varian 160 XP Ion
Specifications
ConfigurationMedium Current[1]150mm High Current IMP[3]
CategoryIon Implantation[2]—
Wafer Size12 inch[1]—
Current TypeMedium Current[1]—

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Sources (3)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]waferpedia.comwaferpedia.com
  3. [3]waferpedia.comwaferpedia.com