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Comparison ledger

17099370 Outer strike plateversusViision 80 Ion

Axcelis 17099370 Outer strike plate, Varian Viision 80 Ion, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
OEMAxcelisVarian
CategoryIon ImplantationIon Implantation
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyAxcelis 17099370 Outer strike plateVarian Viision 80
Cited variants—
  • Viision 80 High Current[1]
Specifications
ConfigurationUsed with Axcelis GSD 200[2]5 Wire[4]
ManufacturerAxcelis[3]—
Model17099370 Outer strike plate[2]Viision 80[4]
Part numberOEM number 17099370[3]—
Used withAxcelis GSD 200[2]—
ConditionNEW[3]—
Phase—3 Phase[4]
Voltage—208 V[1]
Power—35 kVA[1]
Electrical phase—3 Phase[4]
Electrical wires—5 Wire[4]
Voltage range—200-230 Vac[5]
Frequency—50/60 Hz[4]
Maximum current—50 A[1]
Full load current—95 Amps[1]
High current—Yes[1]
Wiring—5 Wire[4]
Current—95 Amps[1]
Max Current—50 A[1]
Type—High Current[1]
OEM—Varian[4]
Equipment type—Ion Implanter[4]
Electrical configuration—3 Phase - 5 Wire - 208 Volts - 50/60 Hz[4]
Vintage—1997[4]
Current class—High Current[1]

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Sources (5)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]inventory listing
  3. [3]waferpedia.comwaferpedia.com
  4. [4]inventory listing
  5. [5]inventory listing