Varian
Viision 80 Ion
What it is
How it works
General reference — not yet source-verifiedAn ion implanter generates a beam of ions from a source, isolates the desired ion species using a mass analyzer, accelerates the ions to the required energy, and then scans the beam across the wafer surface. The depth of ion penetration is controlled by the acceleration energy, while the dose is controlled by the beam current and exposure time.
Where it fits in the process flow
General reference — not yet source-verifiedIon implantation typically follows photoresist patterning and precedes thermal annealing. The resist defines areas to be doped, and the implant step introduces dopants. After implantation, an anneal step activates the dopants and repairs crystal damage.
What do the numbers mean?
Power & electrical16
Configuration & options16
Vintage & configurations
Documented models & variants
| Designation | Generation | Vintage | Changes | Source |
|---|---|---|---|---|
| Viision 80 High Current | — | — | High current variant | Equipment inventory listing[3] |
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
- Phase3 Phase[1]
- Configuration208 Volts[1]
- Configuration50/60 Hz[1]
- Voltage208 V[3]
- Configuration95 Amps[3]
- Electrical phase3 Phase[1]
- Electrical wires5 Wire[1]
- Voltage range200-230 Vac[2]
- Frequency50/60 Hz[1]
- Full load current95 Amps[3]
- Voltage208 V (3-phase, 5-wire)[1]
- Voltage200-230 Vac (3-phase)[2]
- Current95 Amps[3]
- Electrical configuration3 Phase - 5 Wire - 208 Volts - 50/60 Hz[1]
- Electrical configuration3 Phase - 50/60 Hz - 200-230 Vac[2]
- Electrical configuration208 V - 3 Phase - 5 Wire - 35 kVA - 50/60 Hz - 95 Amps - 50 A Max.[3]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What does an ion implantation machine do?General reference — not yet source-verified
It injects selected ions into a substrate to change the material's electrical characteristics in a controlled way.
Why is implantation used instead of other doping methods?General reference — not yet source-verified
It allows precise control of where dopants go and how deeply they penetrate, which is important for device structure formation.
Does ion implantation finish the doping step by itself?General reference — not yet source-verified
It creates the implanted dopant profile, but later thermal processing is commonly used in the broader flow to activate the dopants and repair damage.
What kinds of substrates are processed in this class of tool?General reference — not yet source-verified
Machines of this class are used primarily for semiconductor wafers and other substrates that require controlled doping or near-surface modification.
Not publicly documented
The following facts about the Viision 80 Ion are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Viision 80 Ion are on record.
Answerable by: OEM historical records or a trade-press announcement
The control-system platform and OS era of the Viision 80 Ion are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Viision 80 Ion are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Viision 80 Ion is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the Viision 80 Ion are on record.
Answerable by: an OEM parts catalog or a service engineer
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (4)Every fact above is drawn from these public sources
- [1]Inventory photo
- [2]Inventory photo
- [3]inventory listing
- [4]Equipment inventory listing
Last updated Oct 3, 2026.
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