Comparison ledger
Axcelis NV GSD HE Ion, Varian 160 XP Ion, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | NV GSD HE IonAxcelis | 160 XP IonVarian |
|---|---|---|
| OEM | Axcelis | Varian |
| Category | Ion Implantation | Ion Implantation |
| Wafer size | 6" | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Axcelis NV GSD HE Ion | Varian 160 XP Ion |
| Specifications | ||
| Configuration | Refurbished in 2023[1] | 150mm High Current IMP[3] |
| Wafer size | 6" Wafer Handling Station Installed[1] | — |
| Frequency | 60 Hz[2] | — |
| Phase | 3 phase[2] | — |
| Full Load Current | 99 A[1] | — |
| Power | 82 kVA[1] | — |
| Input Breaker | 150 A[1] | — |
| Amp Rating Largest Load | 99 A[2] | — |
| Max Interrupt Capacity | 14 kA[1] | — |
| Beam Exhaust | 1 MeV[2] | — |
| Beam Current | 1 mA[1] | — |
| Main Computer | Solaris, SW 5.3[1] | — |
| Main Monitor | LCD[1] | — |
| Second Computer | Solaris[1] | — |
| Second Monitor | LCD[1] | — |
| OEM | Axcelis[1] | — |
| Model | NV GSD HE[1] | — |
| Category | Ion Implantation[2] | — |
| Wafer Sizes | 6, 8 inch[1] | — |
| Refurbished | 2023[1] | — |
| Beam Handling | Notch[1] | — |
| Dummy Cassette | 25[1] | — |
| Load Buffer | 17[1] | — |
| Vacuum Cassette | 17[1] | — |
| Beam Profile Oscilloscope | Included[1] | — |
| Wafer Handling Station Installed | 6 inch[1] | — |
| Disk Type | ACLS 11003980[1] | — |
| Gyro & Angle - Type & Degree | Alpha & Beta, +/-11 degrees[1] | — |
| Rotary Driver | 1200 rpm[1] | — |
| HV Power Supply | Hunting Hivolt[1] | — |
| HV Stack | Hunting Hivolt[1] | — |
| AMU | Buckley[1] | — |
Plan your fab
Building a Ion Implantation process? Get a complete equipment list.
Open the fab equipment planner →