Axcelis

NV GSD HE Ion

Ion Implantation 6"Axcelis NV GSD HE Ion family

Research Quality: 40% complete

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NV GSD HE Ion — Inventory photo — Fig. 01NV GSD HE IonInventory photo^[1]

Wafer size

Power

60 Hz^[5]

Vacuum

1 MeV^[5]

What it is

The Axcelis NV GSD HE Ion is an ion implantation system.^[1]^[5]

How it works

The Axcelis NV GSD HE Ion includes a source module, a beamline module, a gas box module, a vacuum system, and a process module.^[1]

The Axcelis NV GSD HE Ion includes a beam profile oscilloscope, a Faraday flag, and in-vacuum handling hardware in the process module.^[1]

Where it fits in the process flow

The Axcelis NV GSD HE Ion supports wafer handling for semiconductor processing on 6-inch and 8-inch wafers.^[1]

Applications

General reference — not yet source-verified

Ion implantation is used to form and tune doped regions in semiconductor devices.

What do the numbers mean?

Power & electrical4

Frequency: 60 Hz^[5]
Phase: 3 phase^[5]
Amp Rating Largest Load: 99 A^[5]
HV Power Supply: Hunting Hivolt^[1]

Vacuum & pumping3

Beam Exhaust: 1 MeV^[5]; Vacuum Cassette (17)^[1]
Vacuum Cassette: 17^[1]

Wafer handling6

Wafer size: 6" Wafer Handling Station Installed^[1]; Dummy Cassette (25)^[1]
Wafer Sizes: 6, 8 inch^[1]
Wafer size: 6"^[5]
Dummy Cassette: 25^[1]
Wafer Handling Station Installed: 6 inch^[1]

Control & software2

Main Computer: Solaris, SW 5.3^[1]
Second Computer: Solaris^[1]

Configuration & options23

Refurbished in 2023^[1]
Full Load Current: 99 A^[1]
Power: 82 kVA^[1]
Input Breaker: 150 A^[1]
Max Interrupt Capacity: 14 kA^[1]
Beam Current: 1 mA^[1]; Notch^[1]; Load Buffer (17)^[1]; Beam Profile Oscilloscope^[1]
Main Monitor: LCD^[1]
Second Monitor: LCD^[1]
OEM: Axcelis^[1]
Model: NV GSD HE^[1]
Category: Ion Implantation^[5]
Refurbished: 2023^[1]
Beam Handling: Notch^[1]
Load Buffer: 17^[1]
Beam Profile Oscilloscope: Included^[1]
Disk Type: ACLS 11003980^[1]
Gyro & Angle - Type & Degree: Alpha & Beta, +/-11 degrees^[1]
Rotary Driver: 1200 rpm^[1]
HV Stack: Hunting Hivolt^[1]
AMU: Buckley^[1]

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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

Frequency60 Hz^[5]
Phase3 phase^[5]
Amp Rating Largest Load99 A^[5]
Beam Exhaust1 MeV^[5]
ConfigurationVacuum Cassette (17)^[1]
Vacuum Cassette17^[1]
HV Power SupplyHunting Hivolt^[1]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Not publicly documented

The following facts about the NV GSD HE Ion are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the NV GSD HE Ion are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the NV GSD HE Ion are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the NV GSD HE Ion are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the NV GSD HE Ion are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the NV GSD HE Ion is not on record.
Answerable by: an OEM datasheet or a fab qualification report