Waferpedia

Comparison ledger

017-0146-01 PrealignerversusFPA 3030 i 5 + i-Line

Brooks 017-0146-01 Prealigner, Canon FPA 3030 i 5 + i-Line, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
017-0146-01 PrealignerBrooks
FPA 3030 i 5 + i-LineCanon
OEMBrooksCanon
CategoryLithographyLithography
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyBrooks 017-0146-01 PrealignerCanon FPA 3030 i 5 + i-Line
Specifications
Make—Canon[1]
Model—FPA 3030 i 5 +[1]
Full Name—Canon FPA 3030 i 5 + i-Line Stepper[1]
Type—Stepper[1]
Wafer Size—6 inch[1]
Asset Number—152933[1]
017-0146-01 Prealigner entryFPA 3030 i 5 + i-Line entryAsk about these tools →Share experience with this comparison →

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Sources (1)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing