Comparison ledger
Cascade Microtech 103-754, KLA Inspex Eagle, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 103-754Cascade Microtech | Inspex EagleKLA |
|---|---|---|
| OEM | Cascade Microtech | KLA |
| Category | Test & Probe | Test & Probe |
| Wafer size | 6-inch diameter microchamber and thermal chuck | 8" |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Cascade Microtech 103-754 | KLA Inspex Eagle |
| Specifications | ||
| type | x-y-z-θ probe positioner[1] | — |
| installed on | HFTL 50-GHz Small-Signal Probe Station[1] | — |
| quantity in station | two[1] | — |
| station chuck size | 6-inch-diameter microchamber and thermal chuck[1] | — |
| Quantity per station | Two positioners[1] | — |
| Chuck size | 6-inch-diameter microchamber and thermal chuck[1] | — |
| Temperature range | -50 to 200 °C[1] | — |
| Configuration | — | Chuck, 6”[2] |
| Wafer size | — | Wafer capability 4” up to 8"[2] |
| Chuck | — | 6"[2] |
| Prealigner | — | 6"[2] |
| Wafer capability | — | 4" up to 8"[2] |
| Wafer handling | — | Cassette to cassette[2] |
| Ports | — | 2[2] |
| Microscope | — | Zeiss Microscope[2] |
| Manuals | — | Including manuals[2] |
| Inspection type | — | Patterned Wafer Laser Inspection[3] |
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