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Cascade Microtech

103-754

Cascade Microtech103-754
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What it is

The Cascade Microtech 103-754 is a probe positioner installed on an HFTL 50-GHz Small-Signal Probe Station. The station includes a 6-inch-diameter microchamber and thermal chuck, along with RF and DC measurement equipment. The 103-754 is an x-y-z-θ probe positioner, and two positioners are installed on the station.[2]

How it works

The Cascade Microtech 103-754 is an x-y-z-θ probe positioner on an HFTL 50-GHz Small-Signal Probe Station. The station configuration carries two such positioners. The station includes a 6-inch-diameter microchamber and thermal chuck.[2]

Where it fits in the process flow

General reference — not yet source-verified

Probe stations generally sit at the electrical test stage of the fabrication flow. Probe stations are used to measure test structures and devices after processing and before packaging. The Cascade Microtech 103-754, as a positioner, is the part of the station that places the probe tip on the device being tested.

Applications

General reference — not yet source-verified

Typical applications include on-wafer characterization of semiconductor devices, RF and DC parametric testing, and failure analysis of fabricated structures. Probe stations of this kind are also used in process development to monitor device behavior as process conditions change.

What do the numbers mean?

Wafer handling2

station chuck size
6-inch-diameter microchamber and thermal chuck[1]
Accurate?
Chuck size
6-inch-diameter microchamber and thermal chuck[1]
Accurate?

Configuration & options6

type
x-y-z-θ probe positioner[1]
Accurate?
installed on
HFTL 50-GHz Small-Signal Probe Station[1]
Accurate?
quantity in station
two[1]
Accurate?
Quantity per station
Two positioners[1]
Accurate?
Quantity per station
Two[1]
Accurate?
Temperature range
-50 to 200 °C[1]
Accurate?
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Where are the manuals?

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Not publicly documented

Field notes

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Frequently asked questions

What is the Cascade Microtech 103-754?

The Cascade Microtech 103-754 is an x-y-z-θ probe positioner installed on an HFTL 50-GHz Small-Signal Probe Station.[2]

How many 103-754 positioners are used on the probe station?

Two positioners are installed on the station.[2]

What other equipment is part of the station?

The station includes a 6-inch-diameter microchamber and thermal chuck, along with RF and DC measurement equipment.[2]

Not publicly documented

The following facts about the 103-754 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the 103-754 are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the 103-754 are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the 103-754 are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the 103-754 are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the 103-754 is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

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Sources & citations

Sources (2)Every fact above is drawn from these public sources
  1. [1]cnf.cornell.edu — cnf.cornell.educnf.cornell.edu
  2. [2]103-754 — Cascade Microtech | Specs, Sourcing & Service | Waferpedia — waferpedia.comwaferpedia.com
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Last updated Sep 22, 2026.

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