Comparison ledger
Cascade Microtech 103-754, MPI PM100, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 103-754Cascade Microtech | PM100MPI |
|---|---|---|
| OEM | Cascade Microtech | MPI |
| Category | Test & Probe | Test & Probe |
| Wafer size | 6-inch diameter microchamber and thermal chuck | 6" |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Cascade Microtech 103-754 | MPI PM100 |
| Specifications | ||
| type | x-y-z-θ probe positioner[1] | — |
| installed on | HFTL 50-GHz Small-Signal Probe Station[1] | — |
| quantity in station | two[1] | — |
| station chuck size | 6-inch-diameter microchamber and thermal chuck[1] | — |
| Quantity per station | Two positioners[1] | — |
| Chuck size | 6-inch-diameter microchamber and thermal chuck[1] | — |
| Temperature range | -50 to 200 °C[1] | — |
| Equipment | — | MPI TS150 Probe Station[2] |
| Use | — | Electrical testing on wafers or chips[2] |
| Terminal capacity | — | Maximum of 4 independent terminals + additional chuck grounding[2] |
| Wafer compatibility | — | Up to 6 inch wafers[2] |
| Probe positioners | — | MPI PM100 true X,Y,Z micro-positioners[2] |
| Probe tips | — | Interchangeable tungsten (W) contact tips[2] |
| Chuck stage | — | Fine-glide chuck stage on highly stable granite base[2] |
| Travel range | — | 150 mm x 150 mm and 10 mm x 10 mm coarse and fine X-Y travel range[2] |
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