Comparison ledger
Dektak 6M, Thermo Fisher 1300 Series Safety, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 6MDektak | 1300 Series SafetyThermo Fisher |
|---|---|---|
| OEM | Dektak | Thermo Fisher |
| Category | Wet Processing / Clean | Wet Processing / Clean |
| Wafer size | 6" | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | 2026 Third-party support only |
| Control system | — | — |
| Generation | — | — |
| Family | Dektak 6M | Thermo Fisher 1300 |
| Specifications | ||
| Instrument type | Stylus profilometer[1] | — |
| Equipment type | Cleanroom Instrumentation; Metrology; Microscopy/Surface Analysis; Surface Analysis[1] | — |
| Measured feature | Film step height[1] | — |
| Measurement range | Steps from 260 microns down to 10 nm[1] | — |
| Additional uses | Surface topography profiling and surface roughness measurement in the nanometer range[1] | — |
| Stylus radius | 25-micron radius high aspect ratio stylus[1] | — |
| Maximum acceptable sample size | 6 inches[1] | — |
| Location | FNT 4.106[1] | — |
| Contact | Dr. Raluca Gearba[1] | — |
| Step height measurement range | 260 µm to 10 nm[1] | — |
| Maximum sample size | 6 inches[1] | — |
| Configuration | — | Class II[2] |
| Cabinet type | — | Class II, Type A2 biological safety cabinet[3] |
| Airflow compensation | — | SmartFlow airflow compensation system[3] |
| Motors | — | Dual DC motors[3] |
| Front window design | — | SmartClean front window design[3] |
| Control panel | — | Intuitive control panel with constant readout of downflow and inflow velocities and filter reserve status[3] |
| UV light | — | Programmable UV light[3] |
| SmartPort | — | SmartPort convenience for routing tubing and cables through the side walls[3] |
| Available widths | — | 3-foot, 4-foot, 5-foot, and 6-foot sizes[3] |
| Front opening choices | — | 8-inch or 10-inch front opening[3] |
| Filter specification | — | H14 HEPA filters, EN 1822, 99.995% @ MPPS[4] |
| Certification | — | NSF/ANSI 49, UL, CE[4] |
| Service valves | — | Up to 6 total, 3 on each side wall[4] |
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