Comparison ledger
Heller 1088, MKS FI 20160 1 Microwave, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 1088Heller | |
|---|---|---|
| OEM | Heller | MKS |
| Category | Thermal / Diffusion | Thermal / Diffusion |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Heller 1088 | MKS FI 20160 |
| Specifications | ||
| Heating Zones | 8 zones (4 top and 4 below) plus 1 cooling zone[1] | — |
| Heating Method | Forced convection[1] | — |
| Conveyor Width | 18 inches (45 cm)[1] | — |
| Heated Length | 43.5 inches (111 cm)[1] | — |
| Overall Length | 96 inches (244 cm)[1] | — |
| Height | 50 inches (127 cm)[1] | — |
| Net Weight | 900 lbs (409 kg)[1] | — |
| Thermal Profiler | Included[1] | — |
| Oven Top | Counter balance for easy access to conveyor[1] | — |
| Solder Compatibility | Lead-free and leaded soldering[1] | — |
| Phase | — | SmartPower series - 3.0 kW - Liquid-cooled - 200–208 VAC, 3-phase - Remote / DeviceNet control[2] |
| Voltage | — | 208 V[2] |
| Configuration | — | 20 A[2] |
| Power | — | 3.0 kW[2] |
| Cooling | — | Liquid-cooled[2] |
| Current | — | 20 A[2] |
| Frequency | — | 50/60 Hz[2] |
| Control | — | Remote / DeviceNet[2] |
Plan your fab
Building a Thermal / Diffusion process? Get a complete equipment list.
Open the fab equipment planner →