MKS
FI 20160 1 Microwave
What it is
The MKS FI 20160 1 is a microwave plasma generator belonging to the MKS SmartPower series.[1][2]
The generator is rated at 3.0 kW and is designed to supply microwave energy for plasma generation in semiconductor processing equipment.[1][2]
The FI 20160 1 is liquid-cooled and operates on a 200–208 VAC, three-phase electrical supply at 50/60 Hz, drawing up to 20 A.[1][2]
Control of the generator is accomplished via remote or DeviceNet communication interfaces.[1][2]
How it works
General reference — not yet source-verifiedRemote or DeviceNet control allows the generator to be integrated into automated manufacturing systems, where it can be commanded to set power levels, monitor status, and respond to fault conditions.
Where it fits in the process flow
General reference — not yet source-verifiedIn a semiconductor fab, microwave plasma generators are used as subsystems within plasma processing equipment such as etch chambers, deposition tools, or photoresist strippers.
The generator supplies the energy needed to create and maintain the plasma that performs material removal, thin-film deposition, or surface modification on wafers.
Applications
General reference — not yet source-verifiedTypical applications include plasma-enhanced chemical vapor deposition (PECVD), plasma etching, photoresist stripping, and downstream ashing processes.
Microwave plasma generators are also used in cleaning and surface activation steps where a reactive plasma is required at relatively low temperatures.
What do the numbers mean?
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
Not publicly documented
The following facts about the FI 20160 1 Microwave are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the FI 20160 1 Microwave are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the FI 20160 1 Microwave are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the FI 20160 1 Microwave are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the FI 20160 1 Microwave are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the FI 20160 1 Microwave is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (2)Every fact above is drawn from these public sources
- [1]Inventory photo
- [2]FI 20160 1 Microwave — MKS | Specs, Sourcing & Service | Waferpedia — waferpedia.comwaferpedia.com
Last updated Oct 11, 2026.
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