Comparison ledger
KLA 1.112 PSL Wafer, Rigaku MiniFlex, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | MiniFlexRigaku | |
|---|---|---|
| OEM | KLA | Rigaku |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | 1973– |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA 1.112 PSL Wafer | Rigaku MiniFlex |
| Cited variants | — | |
| Specifications | ||
| Configuration | NIST Traceable[2] | Refurbished[4] |
| Wafer Size | 8 inch[2] | — |
| NIST Traceable | True[2] | — |
| Compatible Tools | Surfscan 6xy0 and Sp1[3] | — |
| X-ray power (Miniflex+) | — | 450 watts at 30 kV and 15 mA[1] |
| Tube power (MiniFlex600) | — | 600 W[1] |
| Sample changer | — | 6-position automatic sample changer[1] |
| Sample changer (6th generation) | — | 8-position automatic sample changer[1] |
| Detector (Miniflex II) | — | 1D silicon strip detector[1] |
| Detector (6th generation) | — | 2D hybrid pixel array detector (HPAD)[1] |
| Source (Miniflex II) | — | Monochromatic X-ray source[1] |
| Goniometer (original and 2nd generation) | — | Horizontal goniometer[1] |
| Goniometer (Miniflex+ and current generation) | — | Vertical goniometer[1] |
| Data output (original and 2nd generation) | — | Internal strip chart recorder[1] |
| Sample spinning (MiniFlex 600) | — | Sample spinning capability[5] |
| Software (MiniFlex600) | — | New PDXL powder diffraction software[1] |
| Software (6th generation) | — | Updated SmartLab Studio II software with fundamental parameter method (FP), phase identification using the Crystallography Open Database (COD), and a wizard for ab initio crystal structure analysis[1] |
| Type | — | X-ray Diffraction (XRD) Analytical Measuring Instrument[1] |
| Form Factor | — | Benchtop (tabletop)[1] |
| Power (MiniFlex+) | — | 450 watts, operating at 30kV and 15mA[1] |
| Power (MiniFlex600) | — | 600W[1] |
| Sample Changer (MiniFlex+ and later) | — | 6-position automatic sample changer[1] |
| Sample Changer (6th gen) | — | 8-position automatic sample changer[1] |
| Detector (6th gen) | — | 2D hybrid pixel array detector (HPAD)[1] |
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