Rigaku
MiniFlex
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
The Rigaku MiniFlex is an X-ray diffraction (XRD) analytical measuring instrument produced by Rigaku. The Rigaku MiniFlex was the first commercial benchtop (tabletop) X-ray diffraction instrument. The Rigaku MiniFlex 600 is a compact benchtop x-ray diffraction system with capabilities including identification of crystalline phases, crystallinity, crystallite size, and crystal structure determination.[1][2]
What it is
The Rigaku MiniFlex is an X-ray diffraction instrument used for metrology and inspection. The MiniFlex is a benchtop X-ray diffraction analytical measuring instrument produced by Rigaku.[1][3]
The MiniFlex line is a compact laboratory instrument family for X-ray diffraction analysis. The current instrument is the fourth in a series introduced in 1973.[1]
How it works
The MiniFlex family includes benchtop configurations with computer control in later generations. Later versions also added a monochromatic X-ray source, a silicon strip detector, and a two-dimensional hybrid pixel array detector.[1]
Where it fits in the process flow
General reference — not yet source-verifiedThe Rigaku MiniFlex fits in the characterization and metrology flow after sample preparation and before final materials acceptance or process tuning. The instrument is used on small specimens and powders when phase identification, crystallinity assessment, or structure-related analysis is needed.
The MiniFlex supports laboratory and cleanroom-adjacent materials analysis rather than wafer fabrication itself. The instrument is used to examine crystalline materials that may come from semiconductor, chemistry, physics, geology, or general materials research workflows.
Applications
The MiniFlex is used for phase identification, crystallinity analysis, crystallite-size evaluation, and crystal-structure determination. The instrument is also used for mineralogy teaching and for research across a wide range of industries and academic disciplines.[2][1]
The MiniFlex line has been used in colleges and universities to teach the physics of X-ray diffraction. The instrument has also been used for materials characterization in research settings.[1]
What do the numbers mean?
Power & electrical2
Optics & imaging3
Control & software3
- Comes with PC, Chiller, Cables and single sample holder[3]
- Software (6th generation)
- Updated SmartLab Studio II software with fundamental parameter method (FP), phase identification using the Crystallography Open Database (COD), and a wizard for ab initio crystal structure analysis[1]
Configuration & options14
- Refurbished[3]
Vintage & configurations
- 1973Production start[1]
The original Miniflex was introduced in 1973.
- 1973Original MiniFlex introduced[1]
First commercial benchtop X-ray diffraction instrument introduced
- 19762nd generation MiniFlex introduced[1]
Second generation MiniFlex introduced
- 1995MiniFlex+ (3rd gen) introduced[1]
Third generation MiniFlex+ with 450W power and computer control
- 2006MiniFlex II introduced[1]
Fourth generation with monochromatic X-ray source and 1D silicon strip detector
- 2012MiniFlex600 introduced[1]
Fifth generation with 600W tube power and PDXL software
- 20176th generation MiniFlex introduced[1]
Sixth generation with 2D HPAD detector and 8-position sample changer
Documented models & variants
| Designation | Generation | Vintage | Changes | Source |
|---|---|---|---|---|
| Miniflex | original | 1973 | — | en.wikipedia.org[1] |
| MiniFlex II | — | 2006 | Introduced a monochromatic X-ray source and a 1D silicon strip detector. | en.wikipedia.org[1] |
| MiniFlex600 | 5th generation | 2012 | Built upon the line with 600 W tube power and PDXL powder diffraction software. | en.wikipedia.org[1] |
| Original Miniflex | 1st generation | 1973 | About one-tenth the size and dramatically less expensive than conventional X-ray diffraction equipment of the period; employed a horizontal goniometer with data output provided by an internal strip chart recorder | en.wikipedia.org[1] |
| 2nd Generation Miniflex | 2nd generation | 1976 | Employed a horizontal goniometer with data output provided by an internal strip chart recorder | en.wikipedia.org[1] |
| 6th generation MiniFlex | 6th generation | 2017 | Incorporated a 2D hybrid pixel array detector (HPAD) and an 8-position automatic sample changer; updated SmartLab Studio II software with fundamental parameter method (FP), phase identification using the Crystallography Open Database (COD), and a wizard for ab initio crystal structure analysis | en.wikipedia.org[1] |
| MiniFlex (original) | 1st generation | 1973 | First commercial benchtop X-ray diffraction instrument; horizontal goniometer with strip chart recorder | en.wikipedia.org[1] |
| MiniFlex (2nd generation) | 2nd generation | 1976 | Horizontal goniometer with strip chart recorder | en.wikipedia.org[1] |
| MiniFlex (6th generation) | 6th generation | 2017 | 2D hybrid pixel array detector (HPAD); 8-position automatic sample changer; SmartLab Studio II software with fundamental parameter method | en.wikipedia.org[1] |
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What type of instrument is the Rigaku MiniFlex?
The Rigaku MiniFlex is an X-ray diffraction (XRD) analytical measuring instrument.[1]
When was the MiniFlex first introduced?
The MiniFlex was first introduced in 1973.[1]
Who manufactures the MiniFlex?
The MiniFlex is produced by Rigaku.[1]
What are the capabilities of the MiniFlex 600?
The MiniFlex 600 is capable of identification of crystalline phases, crystallinity, crystallite size, and crystal structure determination.[2]
Not publicly documented
The following facts about the MiniFlex are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
The control-system platform and OS era of the MiniFlex are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the MiniFlex are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the MiniFlex is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the MiniFlex are on record.
Answerable by: an OEM parts catalog or a service engineer
No publicly hosted manuals, SOPs, or datasheets for the MiniFlex are on record.
Answerable by: university cleanroom staff or an OEM application specialist
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (6)Every fact above is drawn from these public sources
- [1]en.wikipedia.org — en.wikipedia.orgen.wikipedia.org
- [2]tmi.utexas.edu — tmi.utexas.edutmi.utexas.edu
- [3]Inventory photo
- [4]Inventory photo
- [5]Equipment inventory listing
- [6]Equipment inventory listing
Last updated Sep 30, 2026.
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