Comparison ledger
KLA Alpha Step 500, KLA P/N: 0023889-00 Wafer Vacuum Chuck, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | ||
|---|---|---|
| OEM | KLA | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | 150mm | 150mm |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA Alpha Step | KLA P/N: 0023889-00 Wafer Vacuum Chuck |
| Specifications | ||
| Configuration | Does not include PC / Software[1] | Compatible with KLA SP1 Classic // SP1-TBi //SP1-DLS[6] |
| Wafer size | - Up to 6"/150mm Wafer Capable[2] | 150mm / 200mm Wafer Vacuum Chuck[6] |
| - Repeatability | 10Å (1s) or 0.1%[2] | — |
| Type | Profilometer[3] | — |
| Description | Surface Profiler[4] | — |
| Wafer size range | 100mm~200mm[4] | — |
| Vertical range option | 2 mm[3] | — |
| Data export format | ASCII file[3] | — |
| Measurement capabilities | Measures roughness, waviness, and stop height[4] | — |
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