KLA
Alpha Step 500
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
Wafer size
150mm
Performance
10Å (1s) or 0.1%[3]
What it is
The KLA Alpha Step 500 is a stylus-based surface profiler designed for two-dimensional step height metrology profiling. The Alpha Step 500 is a computerized, high-sensitivity surface profiler that measures roughness, waviness, and step height. The instrument provides repeatability of 10 Å (1σ) or 0.1% and supports step height measurements from below 50 nm to 300 µm, with an optional vertical range of 2 mm for tall steps found in MEMS and thick film hybrid circuits.[4][5]
What do the numbers mean?
Wafer handling3
Performance1
Control & software1
- Does not include PC / Software[2]
Dimensions & facilities1
Configuration & options4
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What is the KLA Alpha Step 500?
It is a profilometer.[2]
What is the make and model?
The make is KLA and the model is Alpha Step 500.[2]
Does the equipment include PC or software?
It does not include PC or software.[2]
Not publicly documented
The following facts about the Alpha Step 500 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Alpha Step 500 are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the Alpha Step 500 are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the Alpha Step 500 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Alpha Step 500 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Alpha Step 500 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (6)Every fact above is drawn from these public sources
- [1]Inventory photo
- [2]inventory listing
- [3]dealer listingwotol.com
- [4]web.archive.org — tencor.com (Jul 27, 2003)web.archive.org
- [5]challentech.com.tw — challentech.com.twchallentech.com.tw
- [6]waferpedia.comwaferpedia.com
Last updated Oct 10, 2026.
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