Waferpedia

Comparison ledger

OnTrak Synergy Postversus1 DP 41

Lam Research OnTrak Synergy Post, Logitech 1 DP 41, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
1 DP 41Logitech
OEMLam ResearchLogitech
CategoryCMPCMP
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyLam Research OnTrak Synergy PostLogitech 1 DP 41
Specifications
ConfigurationWith Hepa Mini-Environment[1]50/60 Hz[3]
Tool TypePost-CMP cleaner[2]—
Wafer Size8 inch (200 mm)[1]—
Phase—3 Phase[3]
Voltage—480 V[3]
Make—Logitech[3]
Model—1 DP 41[3]
Frequency—50/60 Hz[3]
Current—12 amps[3]

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Sources (3)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]fabsurplus.comfabsurplus.com
  3. [3]inventory listing