Lam Research
OnTrak Synergy Post
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
The Lam Research OnTrak Synergy Post is a post-CMP cleaner. The OnTrak Synergy Post is an 8-inch wafer cleaning system. The OnTrak Synergy Post includes a HEPA mini-environment.[1][2][3]
What it is
How it works
General reference — not yet source-verifiedA post-CMP cleaner removes residual slurry and other surface contamination after chemical mechanical planarization.
A CMP cleaner is typically placed in a controlled enclosure that helps limit airborne particle exposure during wafer handling and cleaning.
Where it fits in the process flow
General reference — not yet source-verifiedThe OnTrak Synergy Post CMP sits after chemical mechanical planarization and before later wafer process steps that follow surface cleanup.
The cleaner is used at the point where wafers need post-polish cleaning rather than planarization itself.
Applications
What do the numbers mean?
Wafer handling1
Configuration & options2
- With Hepa Mini-Environment[1]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Not publicly documented
The following facts about the OnTrak Synergy Post are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the OnTrak Synergy Post are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the OnTrak Synergy Post are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the OnTrak Synergy Post are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the OnTrak Synergy Post are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the OnTrak Synergy Post is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (3)Every fact above is drawn from these public sources
- [1]inventory listing
- [2]OnTrak Synergy Post — Lam Research | Specs, Sourcing & Service | Waferpedia — waferpedia.comwaferpedia.com
- [3]fabsurplus.com — fabsurplus.comfabsurplus.com
Last updated Oct 11, 2026.
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