Comparison ledger
OAI 808, OAI 808-Aligner-Tool-Procedu, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 808OAI | |
|---|---|---|
| OEM | OAI | OAI |
| Category | Lithography | Lithography |
| Wafer size | 100mm | 100mm |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | OAI 808 | OAI 808-Aligner-Tool-Procedu |
| Specifications | ||
| Type | semi-automated, four-camera, optical front- and backside mask aligner[1] | semi-automated, four-camera, optical front- and backside mask aligner[1] |
| Motorized features | motorized backside focus, motorized auto leveling, auto gap setting[1] | — |
| Size | 2", 100mm, 150mm, 200mm pieces[1] | 2 in, 100 mm, 150 mm, 200 mm[1] |
| Mask size | 4"x4"; 5"x5", 7"x7", and 9"x9"[1] | 4"x4"; 5"x5"; 7"x7"; 9"x9"[1] |
| Top side alignment accuracy | ± 1.0µm 3σ[1] | — |
| Bottom side alignment accuracy | ± 1.25µm 3σ[1] | — |
| Large gap alignment accuracy | Option / ± 1.5µm 3σ[1] | — |
| Resolution | Vacuum + Hard Contact ≤ 1 µm; Hard Contact ≤ 1.5 µm; Soft Contact ≤ 2.0 µm; Proximity ≥ 3.0 µm[1] | Vacuum + Hard Contact ≤ 1 µm; Hard Contact ≤ 1.5 µm; Soft Contact ≤ 2.0 µm; Proximity ≥ 3.0 µm[1] |
| Exposure wavelength | 350 · ´50 nm[1] | 350–450 nm[1] |
| Mercury arc lamp | 350 W[1] | 350 W[1] |
| Model | OAI 808 Aligner[1] | OAI Model 800 Mask Aligner[1] |
| Description | Semi-automated, four-camera, optical front- and backside mask aligner[2] | — |
| Alignment accuracy | Top side alignment: ± 1.0µm 3σ; bottom side alignment: ± 1.25µm 3σ; large gap alignment: option / ± 1.5µm 3σ[1] | 1 µm to 2 µm[1] |
| Lamp | Mercury arc lamp, 350 W[1] | Mercury arc lamp, 350 W[1] |
| Supported substrate sizes | 5 mm to 200 mm[1] | — |
| Thickness | 0.1–10 mm[1] | 0.1-10 mm[1] |
| Automation | — | Semi-automated[1] |
| Camera count | — | Four-camera[1] |
| Alignment type | — | Optical front- and backside mask aligner[1] |
| Backside focus | — | Motorized[1] |
| Auto leveling | — | Motorized[1] |
| Gap setting | — | Auto gap setting[1] |
| Supported piece size | — | 2", 100mm, 150mm, 200mm, pieces[1] |
| Thickness range | — | 0.1–10 mm[1] |
| Top side alignment | — | ± 1.0 µm 3σ[1] |
| Bottom side alignment | — | ± 1.25 µm 3σ[1] |
| Large gap alignment | — | Option / ± 1.5 µm 3σ[1] |
| Motorized backside focus | — | yes[1] |
| Motorized auto leveling | — | yes[1] |
| Auto gap setting | — | yes[1] |
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