Comparison ledger
SCREEN SU 3200, SCREEN SU 3200 Single Wafer Processing, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | SU 3200SCREEN | |
|---|---|---|
| OEM | SCREEN | SCREEN |
| Category | Wet Processing / Clean | — |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | SCREEN SU 3200 | SCREEN SU 3200 |
| Specifications | ||
| Configuration | Chemicals Used: - H3PO4 (Phosphoric Acid) - IPA (Isopropyl Alcohol) - H2O2 (Hydrogen Peroxide) - TM-Y Chemical Tanks / Channels: - 12 channels FOUP Ports: - 4[1] | 12 Chamber Aquaspin[4] |
| Make | SCREEN / DNS[1] | — |
| Model | SU 3200[1] | — |
| Tool type | single-wafer cleaner[2] | — |
| Wafer size | 12 inch (300 mm)[3] | 12 inch (300 mm)[4] |
| Maximum throughput | up to 800 wafers per hour[3] | — |
| Maximum chambers | up to 12 chambers[3] | 12 chambers in four three-level towers[6] |
| Chamber arrangement | 12 chambers in four three-level towers[3] | — |
| Wafer handler | Kawasaki robot[3] | — |
| Chemical supply system | dynamic direct injection (DDI) or cabinet-type chemical supply system[3] | — |
| Communication protocol | SECS/GEMS[3] | — |
| Software version | P2485STD00V2485STD00[3] | P2485STD00V2485STD00[5] |
| Power rating | 208AC-3 Phase[3] | 208AC-3 Phase[5] |
| Chemicals used | H3PO4 (Phosphoric Acid), IPA (Isopropyl Alcohol), H2O2 (Hydrogen Peroxide), TM-Y[1] | — |
| Chemical tanks / channels | 12 channels[1] | — |
| FOUP ports | 4[1] | — |
| Factory Interface | — | FOUP (4)[4] |
| Handler System | — | Kawasaki[4] |
| Software Version | — | Standard[4] |
| CIM | — | SECS / GEMS[4] |
| Process | — | SOM / SPM / SC1/ SC2 / 03W / DHF[4] |
| System power rating | — | 208AC-3 Phase[5] |
| Throughput | — | up to 800 wafers per hour (WPH)[6] |
| Chemical supply options | — | dynamic direct injection (DDI) or cabinet-type chemical supply system[6] |
| Chamber volume reduction | — | about one-third of the previous model[6] |
| Processes | — | SOM / SPM / SC1/ SC2 / 03W / DHF[4] |
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