SCREEN
SU 3200
The SCREEN SU 3200 is a single-wafer cleaner. The SCREEN SU 3200 processes 12-inch (300 mm) wafers. The SCREEN SU 3200 is compatible with processes for 28 nm node and lower.[1][2]
What it is
How it works
Where it fits in the process flow
The SCREEN SU 3200 is compatible with processes for 28 nm node and lower.[1]
Applications
Why won't it start?
Documented failure modes, common issues, and field considerations.
- CC1 & CC3 circulation pumps are not functioning.
- MPOC6 multi-nozzle 1-1 has flow rate below lower limit and temperature control stopped.
What do the numbers mean?
Power & electrical1
Vacuum & pumping1
- CC1 & CC3 Circulation Pumps – NG (not functioning)[3]
Wafer handling4
Gas & chemistry4
- Chemicals Used: - H3PO4 (Phosphoric Acid) - IPA (Isopropyl Alcohol) - H2O2 (Hydrogen Peroxide) - TM-Y Chemical Tanks / Channels: - 12 channels FOUP Ports: - 4[3]
- Chemical supply system
- dynamic direct injection (DDI) or cabinet-type chemical supply system[2]
- Chemicals used
- H3PO4 (Phosphoric Acid), IPA (Isopropyl Alcohol), H2O2 (Hydrogen Peroxide), TM-Y[3]
Control & software2
- MPOC6 Multi-Nozzle 1-1 – Flow rate below lower limit; temperature control stopped[3]
Configuration & options7
- No HDD[3]
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
- ConfigurationChemicals Used: - H3PO4 (Phosphoric Acid) - IPA (Isopropyl Alcohol) - H2O2 (Hydrogen Peroxide) - TM-Y Chemical Tanks / Channels: - 12 channels FOUP Ports: - 4[3]
- ConfigurationCC1 & CC3 Circulation Pumps – NG (not functioning)[3]
- Chemical supply systemdynamic direct injection (DDI) or cabinet-type chemical supply system[2]
- Power rating208AC-3 Phase[2]
- Chemicals usedH3PO4 (Phosphoric Acid), IPA (Isopropyl Alcohol), H2O2 (Hydrogen Peroxide), TM-Y[3]
- Chemical tanks / channels12 channels[3]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
How many processing chambers can the SCREEN SU 3200 accommodate?
The SCREEN SU 3200 can expand to up to 12 processing chambers arranged in four three-level towers.[1][2]
What is the throughput of the SCREEN SU 3200?
The SCREEN SU 3200 achieves throughput of up to 800 wafers per hour.[1][2]
Which processes does the SCREEN SU 3200 support?
The SCREEN SU 3200 supports SOM, SPM, SC1/SC2, O3W, and DHF processes.[2]
Not publicly documented
The following facts about the SU 3200 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the SU 3200 are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the SU 3200 are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the SU 3200 are not on record.
Answerable by: an engineer who operated it or OEM installation records
The process node or technology generation of the SU 3200 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the SU 3200 are on record.
Answerable by: an OEM parts catalog or a service engineer
Sources & citations
Sources (4)Every fact above is drawn from these public sources
- [1]waferpedia.com — waferpedia.comwaferpedia.com
- [2]waferpedia.com — waferpedia.comwaferpedia.com
- [3]Inventory photo
- [4]Inventory photo
Last updated Oct 10, 2026.
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