Comparison ledger
SCREEN SU 3200, Thermo Fisher 1300 Series Safety, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | SU 3200SCREEN | 1300 Series SafetyThermo Fisher |
|---|---|---|
| OEM | SCREEN | Thermo Fisher |
| Category | Wet Processing / Clean | Wet Processing / Clean |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | 2026 Third-party support only |
| Control system | — | — |
| Generation | — | — |
| Family | SCREEN SU 3200 | Thermo Fisher 1300 |
| Specifications | ||
| Configuration | Chemicals Used: - H3PO4 (Phosphoric Acid) - IPA (Isopropyl Alcohol) - H2O2 (Hydrogen Peroxide) - TM-Y Chemical Tanks / Channels: - 12 channels FOUP Ports: - 4[1] | Class II[4] |
| Make | SCREEN / DNS[1] | — |
| Model | SU 3200[1] | — |
| Tool type | single-wafer cleaner[2] | — |
| Wafer size | 12 inch (300 mm)[3] | — |
| Maximum throughput | up to 800 wafers per hour[3] | — |
| Maximum chambers | up to 12 chambers[3] | — |
| Chamber arrangement | 12 chambers in four three-level towers[3] | — |
| Wafer handler | Kawasaki robot[3] | — |
| Chemical supply system | dynamic direct injection (DDI) or cabinet-type chemical supply system[3] | — |
| Communication protocol | SECS/GEMS[3] | — |
| Software version | P2485STD00V2485STD00[3] | — |
| Power rating | 208AC-3 Phase[3] | — |
| Chemicals used | H3PO4 (Phosphoric Acid), IPA (Isopropyl Alcohol), H2O2 (Hydrogen Peroxide), TM-Y[1] | — |
| Chemical tanks / channels | 12 channels[1] | — |
| FOUP ports | 4[1] | — |
| Cabinet type | — | Class II, Type A2 biological safety cabinet[5] |
| Airflow compensation | — | SmartFlow airflow compensation system[5] |
| Motors | — | Dual DC motors[5] |
| Front window design | — | SmartClean front window design[5] |
| Control panel | — | Intuitive control panel with constant readout of downflow and inflow velocities and filter reserve status[5] |
| UV light | — | Programmable UV light[5] |
| SmartPort | — | SmartPort convenience for routing tubing and cables through the side walls[5] |
| Available widths | — | 3-foot, 4-foot, 5-foot, and 6-foot sizes[5] |
| Front opening choices | — | 8-inch or 10-inch front opening[5] |
| Filter specification | — | H14 HEPA filters, EN 1822, 99.995% @ MPPS[6] |
| Certification | — | NSF/ANSI 49, UL, CE[6] |
| Service valves | — | Up to 6 total, 3 on each side wall[6] |
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