Comparison ledger
ABM -407B-2-S-CE-S293 Robot, Oxford Instruments PC2000, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | PC2000Oxford Instruments | |
|---|---|---|
| OEM | ABM | Oxford Instruments |
| Category | — | — |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | ABM -407B-2-S-CE-S293 Robot | Oxford Instruments PC2000 |
| Specifications | ||
| Model | ABM-407B-2-S-CE-S293[1] | — |
| Description | ROBOT[1] | — |
| Refurbished RTP RTA | AG Associates 4100, 4108, 8108, 8800, 8800i,210, 310, 410, 610, 610I, MPT RTP-600S, 800S, RTP-3000[1] | — |
| KLA-Tencor Spare Parts and Service | RS-35C,RS-55,RS-75,RS-100,UV-1050,UV-1080,UV-1250,UV-1280,ASET F5 / F5X,AIT Systems,HRP-220 Stylus Profiler[1] | — |
| Refurbished Isotropic Plasma Etcher | Matrix, Tegal, Lam Research, Branson/IPC, PlasmaTherm[1] | — |
| Refurbished PECVD, ALD Equipment | Cambridge, Oxford PlasmaLab , Plasma-Therm, STS/SPTS, AMAT[1] | — |
| Refurbished Mask Aligner | Canon Neutronix PLA501/545, Suss MA200CC, MA8BA8 GEN3, MA8BA8 GEN2, MA8BA8, MA200E[1] | — |
| Refurbished Bonding | SUSS SB6E, SUSS SB8E, EVG 620 BA, EVG EV501, West Bond 7200AR 7400A[1] | — |
| Refurbished Wafer Prober | Electroglas EG 4090u+, EG 4090, EG 2001X, EG 1034X, Cascade PS-21[1] | — |
| System type | — | plasma system[2] |
| User login system | — | Password controlled user login with different levels of access[2] |
| Data logging | — | Continuous system data logging for traceability of each wafer and process run[2] |
| Communication standard | — | Fully GEM/SECS compatible[2] |
| Cluster control | — | Ability to control a tool cluster from a single interface and PC[2] |
| Operating system | — | Windows XP[3] |
| PLC type | — | Black PLC (older, not upgradeable)[3] |
| Software type | — | Process tool software[2] |
| Interface | — | Front-end visual[2] |
| Recipe management | — | Yes[2] |
| User access control | — | Password-controlled[2] |
| Communication protocol | — | GEM/SECS compatible[2] |
| Host operating system | — | Windows XP[3] |
| Customization | — | Per machine[3] |